Structure and Mechanical Performance of Nitrogen Doped Diamond-like Carbon Films

作     者：Huayu ZHANG Liang-xue LIU Yulei WANG Hongtao MA Fanxin LIU 

作者机构：Harbin Institute of Technology Shenzhen Graduate School Shenzhen518055 China SAE Technologies Development （Dongguan） Co. Ltd. Dongguan 523087 China 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：2007年第23卷第4期

页      面：491-494页

核心收录：

学科分类：0817[工学-化学工程与技术] 0806[工学-冶金工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 0802[工学-机械工程] 0801[工学-力学（可授工学、理学学位）] 0702[理学-物理学] 

主　　题：Nitrogen doped diamond-like carbon films ECR-CVD Structure Mechanical performance 

摘      要：Nitrogen doped diamond-like carbon （DLC：N） films were prepared by electron cyclotron resonance chemical vapor deposition （ECR-CVD） on polycrystalline Si chips. Film thickness is about 50 nm. Auger electron spectroscopy （AES） was used to evaluate nitrogen content, and increasing N2 flow improved N content from 0 to 7.6%. Raman and X-ray photoelectron spectroscopy （XPS） analysis results reveal CN-sp^3C and N-sp^2C structure. With increasing the N2 flow, sp^3C decreases from 73.74% down to 42.66%, and so does N-sp^3C from 68.04% down to 20.23%. The hardness decreases from 29.18 GPa down to 19.74 GPa, and the Young＇s modulus from 193.03 GPa down to 144.52 GPa.