Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption

作     者：Young Jae Park Man Jae Her Youngjae Jeong Dong Ju Choi Dong Uk Kim Min Gi Lim Myung Seok Hong Hyug Su Kwon Kyoungsik Yu Sangyoon Han 

作者机构：Department of Robotics and Mechatronics EngineeringDaegu Gyeongbuk Institute of Science and Technology(DGIST)Daegu 42988Republic of Korea School of Electrical EngineeringKorea Advanced Institute of Science and Technology(KAIST)Daejeon 34141Republic of Korea Agency for Defense DevelopmentDaejeonRepublic of Korea 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2024年第10卷第4期

页      面：355-365页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

基　　金：supported by the Agency For Defense Development Grant Funded by the Korean Government(UI210008TD) 

主　　题：tunable tuning interferometer 

摘      要：The Fabry-Pérot interferometer,a fundamental component in optoelectronic systems,offers interesting applications such as sensors,lasers,and *** this work,we show a tunable Fabry-Pérot cavity consisting of tunable Sagnac loop reflectors(SLRs)and phase shifters based on electrostatic microelectromechanical(MEMS)*** fabrication process of the device is compatible with the standard wafer-level silicon photonics fabrication *** electrostatic actuation mechanism provides well-balanced,scalable pathways for efficient tuning *** extinction ratio of the continuously tunable SLRs’reflectivity is larger than 20 *** 2πphase shifting is achieved,and response times of all the components are less than 25μ*** actuators have extremely low static power,measuring under 20 fW and the energy needed for tuning is both below 20 pJ.