集成乙二醇烷硫醇的CMUT共振生物传感器用于提升DNA无标记检测选择性（英文）
作者机构：State Key Laboratory for Manufacturing Systems Engineering the International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies Xi'an Jiaotong University Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System School of Instrument Science and Technology Xi'an Jiaotong University School of Mechanical Engineering Xi'an Jiaotong University Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Bio/CMOS Interfaces Laboratory Institute of Electrical and Microengineering School of Engineering école Polytechnique F éd érale de Lausanne College of Mechanical and Electrical Engineering Shaanxi University of Science and Technology
出 版 物：《Engineering》 (工程(英文))
年 卷 期：2024年第41卷第10期
页 面：231-241页
核心收录：
学科分类：0831[工学-生物医学工程（可授工学、理学、医学学位）] 080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程] 0836[工学-生物工程]
基 金：supported by the National Key Research and Development Program of China (2022YFB3205400) the National Natural Science Foundation of China (52275570) the Postdoctoral Innovation Talents Support Program (BX20230288) the Postdoctoral Science Foundation of Shaanxi Province(2018BSHEDZZ08)
主 题：Capacitive micromachined ultrasonic transducers (CMUTs) DNA detection Self-assembled monolayer (SAM) Ethylene-glycol alkanethiols Application-specific integrated circuit (ASIC)
摘 要：Gravimetric resonant-inspired biosensors have attracted increasing attention in industrial and point-ofcare applications,enabling label-free detection of biomarkers such as DNA and *** micromachined ultrasonic transducers（CMUTs） are promising tools for developing miniaturized highperformance biosensing complementary metal-oxide-silicon（CMOS） ***,their operability is limited by inefficient functionalizatio n,aggregation,crosstalk in the buffer,and the requirement for an external high-voltage（HV） power *** this study,we aimed to propose a CMUTs-based resonant biosensor integrated with a CMOS front-end interface coupled with ethylene-glycol alkanethiols to detect single-stranded DNA oligonucleotides with large *** topography of the functionalized surface was characterized by energy-dispersive X-ray *** selectivity for onchip hybridization was demonstrated by comparing complementary and non-complementary singlestranded DNA oligonucleotides using fluorescence imaging *** sensor array was further characterized using a five-element lumped equivalent *** 4 mm2application-specific integrated circuit chip was designed and developed through 0.18 μm HV bipolar-CMOS-double diffused metaloxide-silicon（DMOS） technology（BCD） to generate on-chip 20 V HV boosting and to track feedback frequency under a standard 1.8 V supply,with a total power consumption of 3.8 mW in a continuous *** measured results indicated a detection sensitivity of 7.943 × 10-3μmol·***-1 over a concentration range of 1 to 100 μmol·*** conclusion,the label-free biosensing of DNA under dry conditions was successfully demonstrated using a microfabricated CMUT array with a 2 MHz frequency on CMOS electronics with an internal HV ***,ethylene-glycol alkanethiols successfully deposited self-assembled monolayers on aluminum electrodes,which has never been attempted thus far on CMUTs,to enhance the selectivity o
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