Micro-structural and Dielectric Properties of Porous TiO2 Films Synthesized on Titanium Alloys by Micro-arc Discharge Oxidization

作     者：JIN Fanya TONG Honghui SHEN Liru WANG Ke Chu Paul K. 

出 版 物：《Southwestern Institute of Physics Annual Report》 (核工业西南物理研究院年报（英文版）)

年 卷 期：2006年第1期

页      面：207-208页

学科分类：07[理学] 0702[理学-物理学] 

主　　题：微结构 介电性能 多孔渗水 钛合金 氧化物 

摘      要：Titanium oxides （TiO2） and TiO2 films have recently attracted more attention on the application of microelectronic devices and microwave communication systems for processing temperature and environmentally stable dielectric properties characterized by high relative dielectric constant and low dielectric loss. Many deposition methods have been used to prepare TiO2 films including pulsed laser deposition, filered arc deposition, sol-gel method and reactive sputtering methods. Previous reports on TiO2 films prepared by MDO have primarily focused on surface mechanical and biologic properties, in contrast.