Room-temperature NH_3 sensors with high sensitivity and short response/recovery times

作     者：Qingcheng Liang Di Li Shang Gao Dayong Jiang Jianxun Zhao Jieming Qin Jianhua Hou 

作者机构：School of Materials Science and Engineering Changchun University of Science and Technology 

出 版 物：《Chinese Science Bulletin》 (科学通报(英文版))

年 卷 期：2014年第59卷第4期

页      面：447-451页

核心收录：

学科分类：080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程] 

基　　金：supported by the National Nat-ural Science Foundation of China(61106050,21201022,61205038) the Science Foundation for Young Scholars of Changchun University of Science and Technology(XQNJJ-2011-12) the Scientific and Technological Development Project of Jilin Province(201101103,201201121,20120435,20130203033GX) the Scientific and Technological Pillar Project of Changchun(11KZ38) 

主　　题：微传感器 恢复时间 高灵敏度 快速响应 室温 NH3 SiO2 Si 器具 

摘      要：Micro-sensors are fabricated by co-electrospinning In2O3and SnO2nanofibers on the substrates of SiO2/Si with interdigitated Pt signal *** total sensor area is 1.36 mm 9 0.55 mm and the active area is only0.63 mm 9 0.55 *** NH3sensing properties are obtained based on the sensors at room *** sensitivity is at most 28 when the sensors are exposed to NH3of 10 *** response time is 8 s or so and the recovery time is nearly 2 *** only fine selectivity,but also longtime stability is *** results not only demonstrate the obtained micro-sensors are very promising devices for NH3detection,but also show a possible route for large-scale NH3sensor fabrication at the industrial level.