Laser-induced breakdown spectroscopy as a method for millimeter-scale inspection of surface flatness

作     者：Jinrui YE Yaju LI Zhao ZHANG Xinwei WANG Kewei TAO Qiang ZENG Liangwen CHEN Dongbin QIAN Shaofeng ZHANG Lei YANG Xinwen MA 叶晋瑞;李亚举;张朝;王新威;陶科伟;曾强;陈良文;钱东斌;张少峰;杨磊;马新文

作者机构：Institute of Modern PhysicsChinese Academy of SciencesLanzhou 730000People’s Republic of China Advanced Energy Science and TechnologyGuangdong LaboratoryHuizhou 516000People’s Republic of China University of the Chinese Academy of SciencesBeijing 100049People’s Republic of China Key Laboratory of Atomic and Molecular Physics&Functional Materials of Gansu ProvinceCollege of Physics and Electronic EngineeringNorthwest Normal UniversityLanzhou 730070People’s Republic of China Queen Mary University of London Engineering SchoolNorthwestern Polytechnical UniversityXi’an 710072People’s Republic of China 

出 版 物：《Plasma Science and Technology》 (等离子体科学和技术（英文版）)

年 卷 期：2024年第26卷第9期

页      面：148-155页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

基　　金：supported in part by the National Key Research and Development Program of China(No.2022YFA1602500) National Natural Science Foundation of China program(No.U2241288) 

主　　题：laser-induced breakdown spectroscopy machine learning surface flatness 

摘      要：A non-contact method for millimeter-scale inspection of material surface flatness via Laser-Induced Breakdown Spectroscopy(LIBS)is investigated *** experiment is performed using a planished surface of an alloy steel sample to simulate its various flatness,ranging from 0 to 4.4 mm,by adjusting the laser focal plane to the surface distance with a step length of 0.2 *** is found that LIBS measurements are successful in inspecting the flatness differences among these simulated cases,implying that the method investigated here is *** is also found that,for achieving the inspection of surface flatness within such a wide range,when univariate analysis is applied,a piecewise calibration model must be *** is due to the complex dependence of plasma formation conditions on the surface flatness,which inevitably complicates the inspection *** solve the problem,a multivariate analysis with the help of Back-Propagation Neural Network(BPNN)algorithms is applied to further construct the calibration *** detailed analysis of the model performance,we demonstrate that a unified calibration model can be well established based on BPNN algorithms for unambiguous millimeter-scale range inspection of surface flatness with a resolution of about 0.2 mm.