X-ray Diffraction and Raman Spectroscopy Characterization of Isotropic Pyrocarbon Obtained by Hot Wall Chemical Vapor Deposition

作     者：张东生 LI kezhi JIA Yan GUO Lingjun LI Hejun LU Jinhua 

作者机构：State Key Laboratory of Solidification Processing Northwestern Polytechnical University 

出 版 物：《Journal of Wuhan University of Technology(Materials Science)》 (武汉理工大学学报（材料科学英文版）)

年 卷 期：2013年第28卷第2期

页      面：358-361页

核心收录：

学科分类：081702[工学-化学工艺] 081704[工学-应用化学] 07[理学] 08[工学] 0817[工学-化学工程与技术] 070302[理学-分析化学] 0703[理学-化学] 

基　　金：Funded by the National Natural Science Foundation of China(Nos.50832004 and 50972120) the Program of Introducing Talents of Discipline to University(No.B080404) 

主　　题：isotropic pyrocarbon X-ray diffraction raman spectroscopy chemical vapor deposition characterization 

摘      要：Varying the flow rate of natural gas from 50 to 80 to 120 l/h, isotropic pyrocarbon produced by hot wall chemical vapor deposition at 1000 ℃ were examined by X-ray diffraction and Raman spectroscopy. The X-ray data were evaluated by Scherrer equation, and the intensity ratio of D to G band derived from Raman data was used to evaluate the lateral extension of isotropic pyrocarbon. The experimental results show that the d002-spacing of isotropic pyroearbon decreases from 0.3499 nm to 0.3451 nm, while the stack height increases from 6.5 to 8.4 nm with the increase of flow rate of natural gas. The intensity ratio of D to G band and lateral extension of isotropie pyrocarbon increases with natural gas flow rate increasing. After heat treatment, all the crystallite parameters （stack height, lateral extension, and d002-spacing） decrease, indicating the improvement of the arrangement of the basic structural units of isotropic pyrocarbon.