Broad-range,high-linearity,and fast-response pressure sensing enabled by nanomechanical resonators based on 2D non-layered material:β-In_(2)S_(3)

作     者：Junzhi Zhu Song Wu Luming Wang Jiaqi Wu Jiankai Zhu Luwei Zou Fei Xiao Ziluo Su Chenyin Jiao Shenghai Pei Zejuan Zhang Jiaze Qin Bo Xu Yu Zhou Juan Xia Zenghui Wang 

作者机构：Institute of Fundamental and Frontier SciencesUniversity of Electronic Science and Technology of ChinaChengduthe People's Republic of China State Key Laboratory of Transducer TechnologyShanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghaithe People's Republic of China School of PhysicsHunan Key Laboratory of Nanophotonics and DevicesCentral South UniversityChangshathe People's Republic of China State Key Laboratory of Electronic Thin Films and Integrated DevicesUniversity of Electronic Science and Technology of ChinaChengduthe People's Republic of China 

出 版 物：《InfoMat》 (信息材料（英文）)

年 卷 期：2024年第6卷第8期

页      面：119-127页

核心收录：

学科分类：08[工学] 081101[工学-控制理论与控制工程] 0811[工学-控制科学与工程] 081102[工学-检测技术与自动化装置] 

基　　金：National Natural Science Foundation of China,Grant/Award Numbers:T2325007,62250073,U21A20459,62004026,61774029,62104029,12104086,U23A20570,51902346 Sichuan Science and Technology Program,Grant/Award Numbers:24NSFSC5852,24NSFSC5853 Science and Technology Innovation Program of Hunan Province,Grant/Award Number:2021RC3021 

主　　题：2D non-layered materials frequency scaling nanomechanical resonators pressure sensing 

摘      要：Two-dimensional(2D)non-layered materials,along with their unique surface properties,offer intriguing prospects for sensing *** mechanical degrees of freedom is expected to enrich the sensing performances of 2D non-layered devices,such as high frequency,high tunability,and large dynamic range,which could lead to new types of high performance ***,we demonstrate 2D non-layered nanomechanical resonant sensors based onβ-In_(2)S_(3),where the devices exhibit robust nanomechanical vibrations up to the very high frequency(VHF)*** show that such device can operate as pressure sensor with broad range(from 10
3 Torr to atmospheric pressure),high linearity(with a nonlinearity factor as low as 0.0071),and fast response(with an intrinsic response time less than 1μs).We further unveil the frequency scaling law in theseβ-In_(2)S_(3) nanomechanical sensors and successfully extract both the Young s modulus and pretension for the *** work paves the way towards future wafer-scale design and integrated sensors based on 2D non-layered materials.