Strategy of preparing SmCo based films with high coercivity and remanence ratio achieved by temperature and chemical optimization
作者机构:School of Materials Science and EngineeringSouth China University of TechnologyGuangzhou510640China Zhongshan R&D Center for Materials Surface and Thin Films Technology of the South China University of TechnologyGent Materials Surface Technology(Guangdong)Co.Ltd.Zhongshan528437China Institute for Advanced MaterialsSouth China Academy of Advanced OptoelectronicsSouth China Normal UniversityGuangzhou510006China Yangjiang BranchGuangdong Laboratory Materials Science and Technology Yangjiang Advanced Alloys LaboratoryYangjiang529500China Laboratory of Rare-Earth Magnetic Functional MaterialsNingbo Institute of Material Technology and EngineeringChinese Academy of SciencesNingbo315201China Department of PhysicsUniversity of Texas at ArlingtonArlingtonTX76019USA
出 版 物:《Journal of Rare Earths》 (稀土学报(英文版))
年 卷 期:2024年第42卷第7期
页 面:1289-1297,I0004页
核心收录:
学科分类:07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程(可授工学、理学学位)] 0702[理学-物理学]
基 金:Project supported by the National Key R&D Program of China(2022YFB3505700,2022YFB3807900) National Natural Science Foundation of China(51901079) R&D(Research and Development)Plan in Key Areas of Guangdong Province(SDZX2021002,212021032611700001) Natural Science Foundation of Guangdong Province(2020A1515010736,2021A1515010451) the Guangzhou Municipal Science and Technology Program(202007020008)
主 题:Rare earths SmCo based films Phase composition Crystallization conditions Coercivity Remanence ratio
摘 要:SmCo based films with excellent intrinsic magnetic properties have promising applications in micro-electro-mechanical system(MEMS).However,due to the complexity of phase composition and uncontrollable crystallization degree of SmCo hard magnetic phase in the film,both the coercivity(Hc)and remanence(Mr)of films are difficult to enhance *** this paper,SmCo based films were deposited with a Cr underlayer and capping layer on single crystal Si substrates via magnetron sputtering *** effects of annealing parameters and Sm/Co atomic ratio on the phase structure and coercivity of films are *** adjusting the Sm/Co atomic ratio from 1:5 to 1:4,Co soft magnetic phase disappears and the single phase SmCo5 is obtained,leading to the increase of coercivity of the films from 30 to 34 *** influence of deposition temperature and Cu doping on magnetic properties of SmCo based films was *** the deposition temperature increases from room temperature to 250℃,the coercivity will further increase from 34 to 51 ***,a severe kink is observed in the demagnetization curves due to the poor exchanged *** analysis of transmission electron microscopy(TEM)confirms that the average size of non-hard magnetic amorphous phase exceeds the effective exchanged coupling length of SmCo5,which contributes to the decoupling and low remanence ***,doping Cu and applying a post-annealing process can significantly improve the crystallization degree of the *** the coercivity and the remanence ratio of the demagnetization curves are greatly *** propose a plausible strategy to prepare the SmCo based films with high coercivity and remanence ratio by temperature and chemical optimization,which can be utilized in high performed MEMS devices.