All-inorganic ultrathin high-sensitivity transparent temperature sensor based on a Mn-Co-Ni-O nanofilm

作     者：Yuanyuan Cui Mengwei Sun Changbo Liu Yuan Deng 

作者机构：Research Institute for Frontier ScienceBeihang UniversityBeijing 100191China School of Materials Science and EngineeringBeihang UniversityBeijing 100191China Key Laboratory of Intelligent Sensing Materials and Chip Integration Technology of Zhejiang ProvinceHangzhou Innovation Institute of Beihang UniversityHangzhou 310051China 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2024年第10卷第3期

页      面：195-205页

核心收录：

学科分类：080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程] 

基　　金：supported by the National Natural Science Foundation of China(NSFC)(62004009 for C.L.) the National Key Research and Development Program of China(Grant No.2018YFA0702100) the Zhejiang Provincial Key Research and Development Program of China(Grant Nos.2021C01026 and 2021C05002) the Leading Innovative and Entrepreneur Team Introduction Program of Zhejiang(2020R01007) the Beijing Nova Program(20230484412) 

主　　题：transparent sensor versatile 

摘      要：The demand for optically transparent temperature sensors in intelligent devices is ***,the performance of these sensors,particularly in terms of their sensitivity and resolution,must be further *** study introduces a novel transparent and highly sensitive temperature sensor characterized by its ultrathin,freestanding design based on a Mn-Co-Ni-O *** Mn-Co-Ni-O-based sensor exhibits remarkable sensitivity,with a temperature coefficient of resistance of−4%℃^(−1),and can detect minuscule temperature fluctuations as small as 0.03℃.Additionally,the freestanding sensor can be transferred onto any substrate for versatile application while maintaining robust structural stability and excellent resistance to interference,indicating its suitability for operation in challenging *** practical utility in monitoring the surface temperature of optical devices is demonstrated through vertical integration of the sensor and a micro light-emitting diode on a polyimide ***,an experiment in which the sensor is implanted in rats confirms its favorable biocompatibility,highlighting the promising applications of the sensor in the biomedical domain.