Experimental Study of Electrical‑Assisted Nanomachining of Monocrystalline Copper Using Customized Tungsten Tip

作     者：Tao Wang Yanling Tian Zhilai Lu Weijie Wang Zhao Zhang Guangwei Zhu Hui Tang Dawei Zhang Tao Wang;Yanling Tian;Zhilai Lu;Weijie Wang;Zhao Zhang;Guangwei Zhu;Hui Tang;Dawei Zhang

作者机构：Key Laboratory of Mechanism Theory and Equipment Design of Ministry of EducationTianjin UniversityTianjin 300072China School of EngineeringUniversity of WarwickCoventry CV47ALUK State Key Laboratory of High Performance Complex ManufacturingCentral South UniversityChangsha 410083China State Key Laboratory of Precision Electronic Manufacturing Technology and EquipmentGuangdong University of TechnologyGuangzhou 510006China 

出 版 物：《Nanomanufacturing and Metrology》 (纳米制造与计量（英文）)

年 卷 期：2024年第7卷第2期

页      面：60-75页

核心收录：

学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 080502[工学-材料学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：financial support from National Natural Science Foundation of China(52075364,52205506) the Project of State Key Laboratory of Precision Manufacturing for Extreme Service Performance,Central South University(ZZYJKT2023-09) the Guangdong International Cooperation Program of Science and Technology(2022A0505050078) the Open Fund of State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,Guangdong University of Technology(JMDZ2021001) 

主　　题：Tip-based nanofabrication Electrical-assisted machining Nanoscale scratching Machining parameters 

摘      要：As a promising micro/nanofabrication method,electrical-assisted nanomachining has obtained substantial attention due to its high material removal rate and attainable superior surface *** this study,a rectangular wave electrical signal was applied for nanomachining by a customized tungsten *** to the coupling effect between the electric field and mechanical force,the cutting depth of the machined grooves can be *** electrical-assisted groove processing,a depth of 270 nm and an aspect ratio of 0.6 on the copper sample can be *** influence of operation parameters including applied voltage,frequency,duty ratio,normal force and cutting speed on the machining performance was investigated in terms of the groove depth,width,aspect ratio,and surface *** potential machining mechanisms should be a combination of electric field force,nanoscale electric discharge,electric contact thermal effects,possible annealing behavior,and scraping and plowing actions induced by mechanical forces.