Laser patterning of large-scale perovskite single-crystal-based arrays for single-mode laser displays

作     者：Wangqi Mao Haonan Li Bing Tang Chi Zhang Liang Liu Pei Wang Hongxing Dong Long Zhang Wangqi Mao;Haonan Li;Bing Tang;Chi Zhang;Liang Liu;Pei Wang;Hongxing Dong;Long Zhang

作者机构：Department of Optics and Optical EngineeringUniversity of Science and Technology of ChinaHefeiAnhui 230026People’s Republic of China Key Laboratory of Materials for High-Power LaserShanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghai 201800People’s Republic of China Department of Materials Science and Engineeringand Centre for Functional Photonics(CFP)City University of Hong KongHong Kong Special Administrative Region of China 999077People’s Republic of China School of Physics and Optoelectronic EngineeringHangzhou Institute for Advanced StudyUniversity of Chinese Academy of SciencesHangzhouZhejiang 310024People’s Republic of China Key Laboratory for Micro/Nano Physics and Technology of Hunan ProvinceState Key Laboratory of Chemo/Biosensing and ChemometricsCollege of Materials Science and EngineeringHunan UniversityChangsha 410082People’s Republic of China 

出 版 物：《International Journal of Extreme Manufacturing》 (极端制造（英文）)

年 卷 期：2023年第5卷第4期

页      面：462-470页

核心收录：

学科分类：08[工学] 0804[工学-仪器科学与技术] 0703[理学-化学] 0803[工学-光学工程] 

基　　金：the support from the National Natural Science Foundation of China (No. 61925506) the Natural Science Foundation of Shanghai (No. 20JC1414605) Hangzhou Science and Technology Bureau of Zhejiang Province (No. TD2020002) the Academic/Technology Research Leader Program of Shanghai (23XD1404500) 

主　　题：perovskite single-crystal film single-mode microlaser femtosecond-laser processing laser display Supplementary material for this article is available online 

摘      要：Lead halide perovskites have attracted considerable attention as potential candidates for high-performance nano/microlasers,owing to their outstanding optical properties.However,the further development of perovskite microlaser arrays(especially based on polycrystalline thin films)produced by the conventional processing techniques is hindered by the chemical instability and surface roughness of the perovskite structures.Herein,we demonstrate a laser patterning of large-scale,highly crystalline perovskite single-crystal films to fabricate reproducible perovskite single-crystal-based microlaser arrays.Perovskite thin films were directly ablated by femtosecond-laser in multiple low-power cycles at a minimum machining line width of approximately 300 nm to realize high-precision,chemically clean,and repeatable fabrication of microdisk arrays.The surface impurities generated during the process can be washed away to avoid external optical loss due to the robustness of the single-crystal film.Moreover,the high-quality,large-sized perovskite single-crystal films can significantly improve the quality of microcavities,thereby realizing a perovskite microdisk laser with narrow linewidth(0.09 nm)and low threshold(5.1µJ/cm2).Benefiting from the novel laser patterning method and the large-sized perovskite single-crystal films,a high power and high color purity laser display with single-mode microlasers as pixels was successfully fabricated.Thus,this study may offer a potential platform for mass-scale and reproducible fabrication of microlaser arrays,and further facilitate the development of highly integrated applications based on perovskite materials.