Power-efficient programmable integrated multiport photonic interferometer in CMOS-compatible silicon nitride

作     者：SHUQING LIN YANFENG ZHANG ZHAOYANG WU SHIHAO ZENG QING GAO JIAQI LI XIAOQUN YU SIYUAN YU SHUQING LIN;YANFENG ZHANG;ZHAOYANG WU;SHIHAO ZENG;QING GAO;JIAQI LI;XIAOQUN YU;SIYUAN YU

作者机构：State Key Laboratory of Optoelectronic Materials and TechnologiesSchool of Electronics and Information TechnologySun Yat-sen UniversityGuangzhou 510275China Hefei National LaboratoryHefei 230088China 

出 版 物：《Photonics Research》 (光子学研究（英文版）)

年 卷 期：2024年第12卷第3期

页      面：I0011-I0020页

核心收录：

学科分类：080903[工学-微电子学与固体电子学] 070207[理学-光学] 0809[工学-电子科学与技术（可授工学、理学学位）] 07[理学] 08[工学] 0702[理学-物理学] 

基　　金：Innovation Program for Quantum Science and Technology(2021ZD0301400) National Natural Science Foundation of China(61975243,62335019) Science and Technology Program of Guangzhou(202103030001) 

主　　题：unitary arbitrary figuration 

摘      要：Silicon nitride(SiNx)is an appealing waveguide material choice for large-scale,high-performance photonic integrated circuits(PICs)due to its low optical ***,SiNx PICs require high electric power to realize optical reconfiguration via the weak thermo-optic effect,which limits their scalability in terms of device density and chip power *** report a 6-mode programmable interferometer PIC operating at the wavelength of 1550 nm on a CMOS-compatible low-temperature inductance coupled plasma chemical vapor deposition(ICP-CVD)silicon nitride *** employing suspended thermo-optic phase shifters,the PIC achieves 2×improvement in compactness and 10×enhancement in power efficiency compared to conventional *** 6-dimensional linear transformations are demonstrated including cyclic transformations and arbitrary unitary *** work demonstrates the feasibility of fabricating power-efficient large-scale reconfigurable PICs on the low-temperature ICP-CVD silicon nitride platform.