Power-efficient programmable integrated multiport photonic interferometer in CMOS-compatible silicon nitride
作者机构:State Key Laboratory of Optoelectronic Materials and TechnologiesSchool of Electronics and Information TechnologySun Yat-sen UniversityGuangzhou 510275China Hefei National LaboratoryHefei 230088China
出 版 物:《Photonics Research》 (光子学研究(英文版))
年 卷 期:2024年第12卷第3期
页 面:I0011-I0020页
核心收录:
学科分类:080903[工学-微电子学与固体电子学] 070207[理学-光学] 0809[工学-电子科学与技术(可授工学、理学学位)] 07[理学] 08[工学] 0702[理学-物理学]
基 金:Innovation Program for Quantum Science and Technology(2021ZD0301400) National Natural Science Foundation of China(61975243,62335019) Science and Technology Program of Guangzhou(202103030001)
主 题:unitary arbitrary figuration
摘 要:Silicon nitride(SiNx)is an appealing waveguide material choice for large-scale,high-performance photonic integrated circuits(PICs)due to its low optical ***,SiNx PICs require high electric power to realize optical reconfiguration via the weak thermo-optic effect,which limits their scalability in terms of device density and chip power *** report a 6-mode programmable interferometer PIC operating at the wavelength of 1550 nm on a CMOS-compatible low-temperature inductance coupled plasma chemical vapor deposition(ICP-CVD)silicon nitride *** employing suspended thermo-optic phase shifters,the PIC achieves 2×improvement in compactness and 10×enhancement in power efficiency compared to conventional *** 6-dimensional linear transformations are demonstrated including cyclic transformations and arbitrary unitary *** work demonstrates the feasibility of fabricating power-efficient large-scale reconfigurable PICs on the low-temperature ICP-CVD silicon nitride platform.