Laser manufacturing of spatial resolution approaching quantum limit
作者机构：State Key Laboratory of Precision Measurement Technology and InstrumentsDepartment of Precision InstrumentTsinghua UniversityBeijing 100084China State Key Laboratory of Integrated OptoelectronicsCollege of Electronic Science and EngineeringJilin University2699 Qianjin StreetChangchun 130012China
出 版 物：《Light(Science & Applications)》 (光（科学与应用)（英文版）)
年 卷 期：2024年第13卷第3期
页 面：421-428页
核心收录：
学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 0702[理学-物理学]
基 金：the financial support from the National Natural Science Foundation of China(No.62075115,62335013) the National Key R&D Program of China(No.2022YFB4600400)
主 题：quantum limit resolution
摘 要：Atomic and close-to-atom scale manufacturing is a promising avenue toward single-photon emitters,single-electron transistors,single-atom memory,and quantum-bit devices for future communication,computation,and sensing *** manufacturing is outstanding to this end for ease of beam manipulation,batch production,and no requirement for *** is,however,suffering from optical diffraction ***,we report a spatial resolution improved to the quantum limit by exploiting a threshold tracing and lock-in method,whereby the two-order gap between atomic point defect complexes and optical diffraction limit is surpassed,and a feature size of5 nm is *** underlying physics is that the uncertainty of local atom thermal motion dominates electron excitation,rather than the power density slope of the incident *** show that the colour centre yield in hexagonal boron nitride is transformed from stochastic to deterministic,and the emission from individual sites becomes polychromatic to *** a result,single colour centres in the regular array are deterministically created with a unity yield and high positional accuracy,serving as a step forward for integrated quantum technological applications.
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