The Al_(2)O_(3)and Mn/Al_(2)O_(3)sorbents highly utilized in destructive sorption of NF_(3)

作     者：Yanfei Pan Hejian Li Li Zheng Xiufeng Xu Yanfei Pan;Hejian Li;Li Zheng;Xiufeng Xu

作者机构：School of Chemistry and Chemical EngineeringYantai UniversityYantai 264005China 

出 版 物：《Chinese Journal of Chemical Engineering》 (中国化学工程学报（英文版）)

年 卷 期：2024年第65卷第1期

页      面：54-62页

核心收录：

学科分类：083002[工学-环境工程] 0830[工学-环境科学与工程（可授工学、理学、农学学位）] 081702[工学-化学工艺] 0817[工学-化学工程与技术] 08[工学] 

基　　金：The financial support from the Natural Science Foundation of Shandong Province (ZR2020KB003) 

主　　题：Greenhouse gas NF_(3)destructive sorption Sorbents Al_(2)O_(3) Mn/Al_(2)O_(3) Reactivity 

摘      要：NF_(3)is commonly used as an etching and cleaning gas in semiconductor industry,however it is a strongly greenhouse ***,the destruction of disposal NF_(3)is an urgent task to migrate the greenhouse *** the technologies for NF_(3)abatement,the destructive sorption of NF_(3)over metal oxides sorbents is an effective ***,the search for a highly reactive and utilized sorbent for NF_(3)destruction is in great *** this work,AlOOH supported on carbon-sphere(AlOOH/CS)as precursors were synthesized hydrothermally and heat-treated to prepare the Al_(2)O_(3)*** influence of AlOOH/CS hydrothermal temperatures on the reactivity of derived Al_(2)O_(3)sorbents for NF_(3)destruction was investigated,and it is shown that the Al2O3 from AlOOH/CS hydro-thermalized at 120℃is superior to ***,the optimized Al_(2)O_(3)was covered by Mn(OH)x to prepare Mn/Al_(2)O_(3)sorbents via changing hydrothermal temperatures and Mn *** results show that the Mn/Al_(2)O_(3)sorbents are more utilized than bare Al_(2)O_(3)in NF_(3)destructive sorption due to the promotional effect of Mn_(2)O_(3)as surface layer on the fluorination of Al_(2)O_(3)as substrate,especially the optimal 5%Mn/Al2O3(160℃)exhibits a utilization percentage as high as 90.4%,and remarkably exceeds all the sorbents reported so *** findings are beneficial to develop more efficient sorbents for the destruction of NF_(3).