A decouple-decomposition noise analysis model for closed-loop mode-localized tilt sensors

作     者：Kunfeng Wang XingYin Xiong Zheng Wang Liangbo Ma BoWen Wang WuHao Yang Xiaorui Bie ZhiTian Li XuDong Zou 

作者机构：The State Key Laboratory of Transducer TechnologyAerospace Information Research InstituteChinese Academy of SciencesBeijingChina School of ElectronicElectrical and Communication EngineeringUniversity of Chinese Academy of SciencesBeijingChina Ming Hsieh Department of Electrical and Computer EngineeringUniversity of Southern CaliforniaLos AngelesCAUSA Shangdong Key Laboratory of Low-altitude Airspace Surveillance Network TechnologyQiLu Aerospace Information Research InstituteJinanChina 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2023年第9卷第6期

页      面：297-307页

核心收录：

学科分类：080202[工学-机械电子工程] 08[工学] 0804[工学-仪器科学与技术] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 

基　　金：This work was supported in part by the National Key Research and Development Program of China under Grant 2022YFB3207301 

主　　题：weakly couple overcome 

摘      要：The development of mode-localized sensors based on amplitude output metrics has attracted increasing attention in recent years due to the potential of such sensors for high sensitivity and ***-localization phenomena leverage the interaction between multiple coupled resonant modes to achieve enhanced performance,providing a promising solution to overcome the limitations of traditional sensing *** noise plays a key role in determining the resolution of mode-localized sensors,as the output metric is derived from the measured AR(amplitude ratio)within the weakly coupled resonator ***,the amplitude noise originating from the weakly coupled resonator s closed-loop circuit has not yet been fully *** paper presents a decouple-decomposition(DD)noise analysis model,which is applied to achieve high resolution in a mode-localized tilt sensor based on a weakly coupled resonator closed-loop *** DD noise model separates the weakly coupled resonators using the decoupling method considering the nonlinearity of the *** integrating the decoupled weakly coupled resonators,the model decomposes the weakly coupled resonator s closed-loop circuit into distinct paths for amplitude and phase noise *** DD noise model reveals noise effects at various circuit nodes and models the system noise in the closed-loop circuit of the weakly coupled ***/Simulink simulations verify the model s accuracy when compared to theoretical *** the optimal operating point,the mode-localized tilt sensor achieves an input-referred instability of 3.91×10^(-4°)and an input-referred AR of PSD of 2.01×10^(-4°)⁄√Hz using the closed-loop noise *** model is also applicable to other varieties of mode-localized sensors.