Invisible vapor catalysis in graphene growth by chemical vapor deposition
作者机构:Center for NanochemistryBeijing Science and Engineering Center for NanocarbonsBeijing National Laboratory for Molecular ScienceCollege of Chemistry and Molecular EngineeringPeking UniversityBeijing 100871China Beijing Graphene Institute(BGI)Beijing 100095China Academy for Advanced Interdisciplinary StudiesPeking UniversityBeijing 100871China School of Materials Science and EngineeringJiangsu UniversityZhenjiang 212013China Department of EngineeringUniversity of CambridgeCambridge CB30FAUK College of EnergySoochow Institute for Energy and Materials InnovationS(SIEMIS)Jiangsu Provincial Key Laboratory for Advanced Carbon Materials and Wearable Energy TechnologiesSoochow UniversitySuzhou 215006China
出 版 物:《Nano Research》 (纳米研究(英文版))
年 卷 期:2024年第17卷第5期
页 面:4259-4269页
核心收录:
学科分类:081704[工学-应用化学] 07[理学] 070304[理学-物理化学(含∶化学物理)] 08[工学] 0817[工学-化学工程与技术] 0805[工学-材料科学与工程(可授工学、理学学位)] 0703[理学-化学] 0702[理学-物理学]
基 金:supported by the National Natural Science Foundation of China(Nos.T2188101,52021006,52072042) the National Natural Science Foundation of China Youth Scientist Fund(Nos.22105006,52202033) Beijing National Laboratory for Molecular Science(No.BNLMS-CXTD-202001) the National Key R&D Program of China(Nos.2016YFA0200101,2016YFA0200103,2018YFA0703502) the Beijing Municipal Science&Technology Commission(Nos.Z191100000819005,Z191100000819007,Z201100008720005)
主 题:vapor catalysis graphene growth chemical vapor deposition first-principles calculation
摘 要:Vapor catalysis was recently found to play a crucial role in superclean graphene growth via chemical vapor decomposition(CVD).However,knowledge of vapor-phase catalysis is scarce,and several fundamental issues,including vapor compositions and their impact on graphene growth,are ***,by combining density functional theory(DFT)calculations,an ideal gas model,and a designed experiment,we found that the vapor was mainly composed of Cui clusters with tens of *** vapor pressure was estimated to be~10^(-12)-10^(-1)1 bar under normal low-pressure CVD system(LPCVD)conditions for graphene growth,and the exposed surface area of Cui clusters in the vapor was 22-269 times that of the Cu substrate surface,highlighting the importance of vapor *** calculations show Cu clusters,represented by Cu17,have strong capabilities for adsorption,dehydrogenation,and decomposition of *** exhibit an adsorption lifetime and reaction flux six orders of magnitude higher than those on the Cu surface,thus providing a sufficient supply of active C atoms for rapid graphene growth and improving the surface cleanliness of the synthesized *** experimental validation showed that increasing the amount of Cu vapor improved the as-synthesized graphene growth rate and surface *** study provides a comprehensive understanding of vapor catalysis and the fundamental basis of vapor control for superclean graphene rapid growth.