Laser-based defect characterization and removal process for manufacturing fused silica optic with high ultraviolet laser damage threshold

作     者：Xiaocong Peng Xin Cheng Chaoyang Wei Songlin Wan Kaizao Ni Zhenqi Niu Yichi Han Zhigang Jiang Zhen Cao Jianda Shao 

作者机构：Precision Optical Manufacturing and Testing CentreShanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghaiChina201800 Key Laboratory for High Power Laser Material of Chinese Academy of SciencesShanghai Institute of Optics and Fine MechanicsShanghaiChina201800 Centre of Material Science and Optoelectronics EngineeringUniversity of Chinese Academy of SciencesBeijingChina100049 Hangzhou Institute for Advanced StudyUniversity of Chinese Academy of SciencesHangzhouChina310024 

出 版 物：《Light(Advanced Manufacturing)》 (光（先进制造）（英文）)

年 卷 期：2023年第4卷第3期

页      面：181-194页

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

基　　金：supported by the National Key Research and Development Project(2022YFB3403400) Shanghai Sailing Program(20YF1454800) National Natural Science Youth Foundation of China(62205352) Natural Science Foundation of Shanghai(21ZR1472000) Key Projects of the Joint Fund for Astronomy of the National Natural Science Funding of China(U1831211),and the Youth Innovation Promotion Association of the Chinese Academy of Sciences 

主　　题：Fused silica Laser materials processing Defect characterization Subsurface damage Process chain 

摘      要：Residual processing defects during the contact processing processes greatly reduce the anti-ultraviolet(UV)laser damage performance of fused silica optics,which significantly limited development of high-energy laser *** this study,we demonstrate the manufacturing of fused silica optics with a high damage threshold using a CO_(2)laser process *** on theoretical and experimental studies,the proposed uniform layer-by-layer laser ablation technique can be used to characterize the subsurface mechanical damage in three-dimensional full *** ablation resolutions ranging from nanometers to micrometers can be realized;the minimum longitudinal resolution is5 *** technique can also be used as a crack-free grinding tool to completely remove subsurface mechanical damage,and as a cleaning tool to effectively clean surface/subsurface *** effective control of defects in the entire chain,the laser-induced damage thresholds of samples fabricated by the CO_(2)laser process chain were 41%(0%probability)and 65.7%(100%probability)higher than those of samples fabricated using the conventional process *** laser-based defect characterization and removal process provides a new tool to guide optimization of the conventional finishing process and represents a new direction for fabrication of highly damage-resistant fused silica optics for high-energy laser applications.