3D-printed facet-attached microlenses for advanced photonic system assembly
作者机构:Institute of Photonics and Quantum Electronics(IPQ)Karlsruhe Institute of Technology(KIT)Engesserstr.576131 KarlsruheGermany Institute of Microstructure Technology(IMT)KITHermann-von-Helmholtz-Platz 176344 Eggenstein-LeopoldshafenGermany Vanguard Automation GmbHGablonzer Strasse.1076185 KarlsruheGermany ficon TEC Service GmbHIm Finigen 328832 AchimGermany II-VI Inc.Reuchlinstraße 10/1110553 BerlinGermany Photonics Research GroupGhent University-imecTechnologiepark-Zwijnaarde 126B-9052 GentBelgium Tyndall National InstituteT12 R5CP CorkIreland Eblana Photonics Ltd.West Pier Business Campus3 Old Dunleary RdDún LaoghaireDublinA96 A621Ireland
出 版 物:《Light(Advanced Manufacturing)》 (光(先进制造)(英文))
年 卷 期:2023年第4卷第2期
页 面:1-17页
学科分类:070207[理学-光学] 07[理学] 08[工学] 0803[工学-光学工程] 0702[理学-物理学]
基 金:the Deutsche Forschungsgemeinschaft(DFG,German Research Foundation)under Germany’s Excellence Strategy via the Excellence Cluster 3D Matter Made to Order(EXC-2082/1-390761711) the Collaborative Research Center WavePhenomena(CRC 1173) by the Bundesministerium für Bildung und Forschung(BMBF)via the projects PRIMA(#13N14630),DiFeMiS(#16ES0948) which is part of the programme“Forschungslabore Mikroelektronik Deutschland(ForLab),and Open6GHub(#16KISK010) by the European Research Council(ERC Consolidator Grant‘TeraSHAPE’ #773248),by the H2020 Photonic Packaging Pilot Line PIXAPP(#731954) by the Alfried Krupp von Bohlen und Halbach Foundation,and by the Karlsruhe School of Optics and Photonics(KSOP)
主 题:Photonic integration Photonic assembly Photonic packaging Additive laser manufacturing Multi-photon lithography Facet-attached microlenses Optical alignment tolerances Fiber-chip coupling Hybrid multi-chip modules
摘 要:Wafer-level mass production of photonic integrated circuits(PIC)has become a technological mainstay in the field of optics and photonics,enabling many novel and disrupting a wide range of existing ***,scalable photonic packaging and system assembly still represents a major challenge that often hinders commercial adoption of PIC-based ***,chip-to-chip and fiber-to-chip connections often rely on so-called active alignment techniques,where the coupling efficiency is continuously measured and optimized during the assembly *** unavoidably leads to technically complex assembly processes and high cost,thereby eliminating most of the inherent scalability advantages of PIC-based *** this paper,we demonstrate that 3D-printed facet-attached microlenses(FaML)can overcome this problem by opening an attractive path towards highly scalable photonic system assembly,relying entirely on passive assembly techniques based on industry-standard machine vision and/or simple mechanical *** can be printed with high precision to the facets of optical components using multi-photon lithography,thereby offering the possibility to shape the emitted beams by freely designed refractive or reflective ***,the emitted beams can be collimated to a comparatively large diameter that is independent of the device-specific mode fields,thereby relaxing both axial and lateral alignment ***,the FaML concept allows to insert discrete optical elements such as optical isolators into the free-space beam paths between PIC *** show the viability and the versatility of the scheme in a series of selected experiments of high technical relevance,comprising pluggable fiber-chip interfaces,the combination of PIC with discrete micro-optical elements such as polarization beam splitters,as well as coupling with ultra-low back-reflection based on non-planar beam paths that only comprise tilted optical *** on our re