A motion characteristics modeled angular position sensor by nonlinear transfer of differential capacitance for miniaturized scanning mirrors

作     者：Songtao Liu Gaofei Zhang Lingyun Zhang Junya Wang Minghao Gong Zheng You 

作者机构：Department of Precision InstrumentTsinghua UniversityBejing 100084China Key Laboratory of Smart Microsystem(Tsinghua University)Ministry of EducationBeijing 100084China State Key Laboratory of Precision Measurement Technology and InstrumentsTsinghua UniversityBeijing 100084China School of Mechanical Science&EngineerHuazhong University of Science and TechnologyWuhan 430074China 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2023年第9卷第6期

页      面：129-147页

核心收录：

学科分类：080801[工学-电机与电器] 0808[工学-电气工程] 080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程] 

基　　金：financially supported by Beijing Advanced Innovation Center for Integrated Circuits the National Engineering Research Center for Offshore Windpower(HSFD22009) 

主　　题：capacitance angular nonlinear 

摘      要：In this paper,an angular position sensor(APS)designed for a resonant miniaturized scanning mirror(M-SM)is *** APS operates based on the principle of differential variable capacitance,significantly expanding the detectable bandwidth from a few hertz to several *** modeling the motion characteristics,the sampling rates of the biaxial scanning angles are 1473.6 times and 539.4 times higher than those of conventional ***,the motion characteristics model is presented as a simple harmonic motion,converting sampled capacitance into continuous ***,the nonparallel state of the M-SM and sensor is transformed into a parallel state through the space coordinate system ***,a 2D nonlinear angle transfer function is developed to convert the differential capacitance into an angle,thereby mitigating the nonlinear errors resulting from large *** an accuracy better than 0.014°,the measuring range expands from±0.5729°(±10 mrad)to±5.026°(±87 mrad).Additionally,the capturing mode and tracking mode are proposed to monitor real-time angular changes of the M-SM with an accuracy of 0.017°.High-precision APSs have enhanced beam pointing accuracy and resolution and can thereby be used to advance the development of laser components,including light detection and ranging(LiDAR).