Spatial phase-shifting interferometry with compensation of geometric errors based on genetic algorithm(Invited Paper)

作     者：Joonku Hahn Hwi Kim Yongjun Lim Eun-Hee Kim Byoungho Lee 

作者机构：School of Electrical Engineering Seoul National University 

出 版 物：《Chinese Optics Letters》 (中国光学快报（英文版）)

年 卷 期：2009年第7卷第12期

页      面：1113-1116页

核心收录：

学科分类：12[管理学] 1201[管理学-管理科学与工程(可授管理学、工学学位)] 081104[工学-模式识别与智能系统] 08[工学] 0835[工学-软件工程] 0811[工学-控制科学与工程] 0812[工学-计算机科学与技术（可授工学、理学学位）] 

基　　金：supported by the National Research Foundation and the Ministry of Education  Science and Engineering of Korea through the National Creative Re-search Initiative Program (R16-2007-030-01001-0) 

主　　题：Spatial phase shifting interferometry with compensation of geometric errors based on genetic algorithm 

摘      要：We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properties that change rapidly in time than the temporal phase-shifting interferometry. However, it is more susceptible to the geometric errors since the positions at which interferograms are collected are different. In this letter, we propose a spatial phase-shifting interferometry with separate paths for object and reference waves. Also, the object wave estimate is parameterized in terms of geometric errors, and the error is compensated by using a genetic algorithm.