Energy‑efcient integrated silicon optical phased array

作     者：Huaqing Qiu Yong Liu Xiansong Meng Xiaowei Guan Yunhong Ding Hao Hu Huaqing Qiu;Yong Liu;Xiansong Meng;Xiaowei Guan;Yunhong Ding;Hao Hu

作者机构：DTU ElectroDepartment of Electrical and Photonics EngineeringTechnical University of DenmarkKgs.Lyngby DK-2800Denmark Interuniversity Microelectronics Center(IMEC)Kapeldreef 75Leuven 3001Belgium Jiaxing Key Laboratory of Photonic Sensing and Intelligent ImagingJiaxing 314000China Intelligent Optics and Photonics Research CenterJiaxing Research InstituteZhejiang UniversityJiaxing 314000China 

出 版 物：《Frontiers of Optoelectronics》 (光电子前沿（英文版）)

年 卷 期：2023年第16卷第3期

页      面：77-100页

核心收录：

学科分类：070207[理学-光学] 07[理学] 08[工学] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：the Novo Nordisk Fonden(NNF22OC0080333) Villum Fonden(15401) 

主　　题：Optical phased array Optical phase shifter Silicon photonics Integrated optics 

摘      要：An optical phased array(OPA)is a promising non-mechanical technique for beam steering in solid-state light detection and ranging *** performance of the OPA largely depends on the phase shifter,which afects power consumption,insertion loss,modulation speed,and ***,for a thermo-optic phase shifter,achieving good performance in all aspects is challenging due to trade-ofs among these *** this work,we propose and demonstrate two types of energy-efcient optical phase shifters that overcome these trade-ofs and achieve a well-balanced performance in all ***,the proposed round-spiral phase shifter is robust in fabrication and fully compatible with deep ultraviolet(DUV)processes,making it an ideal building block for large-scale photonic integrated circuits(PICs).Using the high-performance phase shifter,we propose a periodic OPA with low power consumption,whose maximum electric power consumption within the feld of view is only 0.33 ***,we designed Gaussian power distribution in both the azimuthal(ψ)and polar(θ)directions and experimentally achieved a large sidelobe suppression ratio of 15.1 and 25 dB,respectively.