Angle Measurement Based on Second Harmonic Generation Using Artificial Neural Network

作     者：Kuangyi Li Zhiyang Zhang Jiahui Lin Ryo Sato Hiraku Matsukuma Wei Gao Kuangyi Li;Zhiyang Zhang;Jiahui Lin;Ryo Sato;Hiraku Matsukuma;Wei Gao

作者机构：Precision Nanometrology LaboratoryDepartment of FinemechanicsTohoku UniversitySendai 980-8579Japan 

出 版 物：《Nanomanufacturing and Metrology》 (纳米制造与计量（英文）)

年 卷 期：2023年第6卷第4期

页      面：1-15页

核心收录：

学科分类：1003[医学-口腔医学] 10[医学] 

基　　金：supported by the Japan Society for the Promo-tion of Science(20H00211) 

主　　题：Angle measurement Second harmonic generation Artifcial neural network Femtosecond laser 

摘      要：This article proposed an angle measurement method based on second harmonic generation(SHG)using an artifcial neural network(ANN).The method comprises three sequential parts:SHG spectrum collection,data preprocessing,and neural network ***,the referenced angles and SHG spectrums are collected by the autocollimator and SHG-based angle sensor,respectively,for *** mapping is learned by the trained ANN after completing the training process,which solves the inverse problem of obtaining the angle from the SHG ***,the feasibility of the proposed method is verifed in multiple-peak Maker fringe and single-peak phase-matching areas,with an overall angle measurement range exceeding 20,000 *** predicted angles by ANN are compared with the autocollimator to evaluate the measure-ment performance in all the angular ***,a sub-arcsecond level of accuracy and resolution is achieved in the phase-matching area.