Spatial light modulation for femtosecond laser manufacturing:Current developments and challenges
作者机构:State Key Laboratory of Integrated OptoelectronicsCollege of Electronic Science and EngineeringJilin UniversityChangchun 130012China State Key Laboratory of Precision Measurement and InstrumentsDepartment of Precision InstrumentTsinghua UniversityBeijing 100084China
出 版 物:《Science China(Technological Sciences)》 (中国科学(技术科学英文版))
年 卷 期:2024年第67卷第1期
页 面:60-72页
核心收录:
学科分类:080901[工学-物理电子学] 0809[工学-电子科学与技术(可授工学、理学学位)] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0805[工学-材料科学与工程(可授工学、理学学位)] 0803[工学-光学工程]
基 金:This work was supported by the National Key R&D Program of China(Grant No.2021YFB2802000) the National Natural Science Foundation of China(Grant Nos.61827826,62175086,62131018) the Natural Science Foundation of Jilin Province(Grant No.20220101107JC) the Education Department of Jilin Province(Grant No.JJKH20221003KJ)
主 题:femtosecond laser manufacturing spatial light modulation structured light aberration correction parallel processing focal field engineering polarization control
摘 要:Since the invention of lasers,spatial-light-modulated laser processing has become a powerful tool for various *** enables multidimensional and dynamic modulation of the laser beam,which significantly improves the processing efficiency,accuracy,and flexibility,and presents wider prospects over traditional mechanical technologies for machining three-dimensional,hard,brittle,or transparent *** this review,we introduce:(1)The role of spatial light modulation technology in the development of femtosecond laser manufacturing;(2)the structured light generated by spatial light modulation and its generation methods;and(3)representative applications of spatial-light-modulated femtosecond laser manufacturing,including aberration correction,parallel processing,focal field engineering,and polarization ***,we summarize the present challenges in the field and possible future research.