Spatial light modulation for femtosecond laser manufacturing:Current developments and challenges

作     者：ZANG Xue LIU ZiTing XU YiShi WANG Yi WANG Qing LI ZhenZe WANG Lei 

作者机构：State Key Laboratory of Integrated OptoelectronicsCollege of Electronic Science and EngineeringJilin UniversityChangchun 130012China State Key Laboratory of Precision Measurement and InstrumentsDepartment of Precision InstrumentTsinghua UniversityBeijing 100084China 

出 版 物：《Science China(Technological Sciences)》 (中国科学（技术科学英文版）)

年 卷 期：2024年第67卷第1期

页      面：60-72页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0805[工学-材料科学与工程（可授工学、理学学位）] 0803[工学-光学工程] 

基　　金：This work was supported by the National Key R&D Program of China(Grant No.2021YFB2802000) the National Natural Science Foundation of China(Grant Nos.61827826,62175086,62131018) the Natural Science Foundation of Jilin Province(Grant No.20220101107JC) the Education Department of Jilin Province(Grant No.JJKH20221003KJ) 

主　　题：femtosecond laser manufacturing spatial light modulation structured light aberration correction parallel processing focal field engineering polarization control 

摘      要：Since the invention of lasers,spatial-light-modulated laser processing has become a powerful tool for various *** enables multidimensional and dynamic modulation of the laser beam,which significantly improves the processing efficiency,accuracy,and flexibility,and presents wider prospects over traditional mechanical technologies for machining three-dimensional,hard,brittle,or transparent *** this review,we introduce:(1)The role of spatial light modulation technology in the development of femtosecond laser manufacturing;(2)the structured light generated by spatial light modulation and its generation methods;and(3)representative applications of spatial-light-modulated femtosecond laser manufacturing,including aberration correction,parallel processing,focal field engineering,and polarization ***,we summarize the present challenges in the field and possible future research.