Study of a collisionless magnetized plasma sheath with nonextensively distributed species
作者机构:Centre of Plasma PhysicsInstitute for Plasma ResearchAssam 782402India Institute for Energy TechnologyInstituttveien 8Kjeller 2007Norway
出 版 物:《Plasma Science and Technology》 (等离子体科学和技术(英文版))
年 卷 期:2023年第25卷第12期
页 面:14-23页
核心收录:
学科分类:07[理学] 070204[理学-等离子体物理] 0702[理学-物理学]
主 题:magnetised plasma sheath electronegative plasma non-extensive distribution
摘 要:A weakly magnetized sheath for a collisionless, electronegative plasma comprising positive ions,electrons, and negative ions is investigated numerically using the fluid approach. The electrons are considered to be non-Maxwellian in nature and are described by Tsalli s distribution. Such electrons have a substantial effect on the sheath properties. The study also reveals that non-Maxwellian distribution is the most realistic description for negative ions in the presence of an oblique magnetic field. In addition to the negative ion temperature, the sheath potential is also affected by the nonextensive parameters. The present research finds application in the plasma processing and semiconductor industry as well as in space plasmas.