Bending sensor based on flexible spin valve

作     者：L I Naumova R S Zavornitsyn M A Milyaev N G Bebenin A Y Pavlova M V Makarova I K Maksimova V V Proglyado A A Zakharov V V Ustinov LI Naumova;R S Zavornitsyn;M A Milyaev;N G Bebenin;A Y Pavlova;M V Makarova;I K Maksimova;V V Proglyado;A A Zakharov;V V Ustinov

作者机构：M.N.Miheev Institute of Metal PhysicsUral BranchRussian Academy of SciencesS.Kovalevskoi Street 18Ekaterinburg 620990Russia 

出 版 物：《Chinese Physics B》 (中国物理B（英文版）)

年 卷 期：2023年第32卷第5期

页      面：655-661页

核心收录：

学科分类：080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程] 

基　　金：performed within the framework of State Assignment from the Ministry of Education and Science of Russian Federation (topic Spin, No. 122021000036-3 and topic Magnet, No. 122021000034-9) partially supported by the Russian Foundation for Basic Research (project No. 2042-660018) 

主　　题：spin valve polymer substrate magnetostriction magnetic anisotropy 

摘      要：Flexible spin valves were prepared by magnetron sputtering on polyimide substrates. The buffer layer that reduces significantly the effect of the polymer substrate on the spin valve microstructure and magnetoresistive properties was revealed. Bending deformation was applied to the microobjects based on the flexible spin valves in parallel to anisotropy axes. It was revealed that during the bend the magnetoresistance changes due to the joint impact of both the change of the magnetic field projection on the film plane and the change of the magnetic properties of the ferromagnetic layers. The obtained dependences have been used in construction of bending sensor, in which the flexible spin valve microstripes were united into the Wheatstone bridge.