Low-loss chip-scale programmable silicon photonic processor

作     者：Yiwei Xie Shihan Hong Hao Yan Changping Zhang Long Zhang Leimeng Zhuang Daoxin Dai Yiwei Xie;Shihan Hong;Hao Yan;Changping Zhang;Long Zhang;Leimeng Zhuang;Daoxin Dai

作者机构：Centre for Optical and Electromagnetic ResearchState Key Laboratory for Modern Optical InstrumentationZhejiang Provincial Key Laboratory for Sensing TechnologiesZhejiang UniversityZijingang CampusHangzhou 310058China Imec USANanoelectronics Design CenterInc.194 Neocity WayKissimmeeFL34744USA Ningbo Research InstituteZhejiang UniversityNingbo 315100China 

出 版 物：《Opto-Electronic Advances》 (光电进展（英文）)

年 卷 期：2023年第6卷第3期

页      面：25-41页

核心收录：

学科分类：080903[工学-微电子学与固体电子学] 0810[工学-信息与通信工程] 0711[理学-系统科学] 0809[工学-电子科学与技术（可授工学、理学学位）] 07[理学] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 080402[工学-测试计量技术及仪器] 0811[工学-控制科学与工程] 0702[理学-物理学] 

基　　金：We are grateful for financial supports from National Major Research and Development Program(No.2018YFB2200200) National Science Fund for Distinguished Young Scholars(61725503) Zhejiang Provincial Natural Science Foundation(LZ18F050001,LGF21F050003) National Natural Science Foundation of China(NSFC)(91950205,6191101294,11861121002,61905209,62175214,62111530147) 

主　　题：silicon photonics programmable photonic integrated circuit waveguide delay lines Mach-Zehnder interferometer 

摘      要：Chip-scale programmable optical signal processors are often used to flexibly manipulate the optical signals for satisfying the demands in various applications,such as lidar,radar,and artificial *** photonics has unique advantages of ultra-high integration density as well as CMOS compatibility,and thus makes it possible to develop large-scale programmable optical signal *** challenge is the high silicon waveguides propagation losses and the high calibration complexity for all tuning elements due to the random phase *** this paper,we propose and demonstrate a programmable silicon photonic processor for the first time by introducing low-loss multimode photonic waveguide spirals and low-random-phase-error Mach-Zehnder *** present chip-scale programmable silicon photonic processor comprises a 1×4 variable power splitter based on cascaded Mach-Zehnder couplers(MZCs),four Ge/Si photodetectors,four channels of thermally-tunable optical *** channel consists of a continuously-tuning phase shifter based on a waveguide spiral with a micro-heater and a digitally-tuning delayline realized with cascaded waveguide-spiral delaylines and MZSs for 5.68 ps time-delay ***,these waveguide spirals used here are designed to be as wide as 2μm,enabling an ultralow propagation loss of 0.28 dB/***,these MZCs and MZSs are designed with 2-μm-wide arm waveguides,and thus the random phase errors in the MZC/MZS arms are negligible,in which case the calibration for these MZSs/MZCs becomes easy and furthermore the power consumption for compensating the phase errors can be reduced ***,this programmable silicon photonic processor is demonstrated successfully to verify a number of distinctively different functionalities,including tunable time-delay,microwave photonic beamforming,arbitrary optical signal filtering,and arbitrary waveform generation.