Low-loss wide-bandwidth planar transmission line with a laminated conductor

作     者：Ken NING Xiao-Chun LI Yan SHAO Junfa MAO 

作者机构：Key Laboratory of Ministry of Education of Design and Electromagnetic Compatibility of High-Speed Electronic SystemsShanghai Jiao Tong University 

出 版 物：《Science China(Information Sciences)》 (中国科学:信息科学(英文版))

年 卷 期：2023年第66卷第5期

页      面：248-256页

核心收录：

学科分类：0810[工学-信息与通信工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 081001[工学-通信与信息系统] 

基　　金：supported by National Natural Science Foundation of China (Grant No. 61831016) Guangdong Provincial Key-Field Research Program (Grant No. 2018B010115001) 

主　　题：coplanar waveguide (CPW) laminated conductor conductor loss skin effect silicon-based technology wide-bandwidth 

摘      要：In this paper, the laminated conductor technology is first introduced to planar-integrated transmission lines. The laminated conductor is composed of multilayers of metal and insulator, which has a lower conductor loss than a solid conductor. Based on the silicon-based micro electromechanical system technology,a laminated coplanar waveguide(CPW) with wide bandwidth and low loss is proposed, which uses a laminated conductor for signal lines and grounds. A laminated CPW and its transition are designed, fabricated,and measured. The simulation results show that the laminated CPW with many insulator layers has a low conductor loss. The measurement results illustrate that the average insertion loss of the laminated CPW is0.65 d B from DC to 40 GHz, which is 44.4% smaller than that of the solid CPW.