Machine Allocation in Semiconductor Wafer Fabrication Systems:A Simulation-Based Approach

作     者：Yanfeng Wu Sihua Chen Yanfeng Wu;Sihua Chen

作者机构：School of FinanceJjiangxi University of Finance and EconomicsNanchang 330013China School of Information ManagementJiangxi University of Finance and EconomicsNanchang 330032China 

出 版 物：《Journal of Systems Science and Systems Engineering》 (系统科学与系统工程学报（英文版）)

年 卷 期：2023年第32卷第3期

页      面：372-390页

核心收录：

学科分类：0810[工学-信息与通信工程] 1205[管理学-图书情报与档案管理] 0711[理学-系统科学] 07[理学] 08[工学] 081101[工学-控制理论与控制工程] 0811[工学-控制科学与工程] 0812[工学-计算机科学与技术（可授工学、理学学位）] 071102[理学-系统分析与集成] 081103[工学-系统工程] 

基　　金：supported in partial by the National Natural Science Foundation of China(NSFC)under Grant No.U2268209 

主　　题：Semiconductor wafer fabrication system machine allocation discrete-event simulation marginal machine allocation 

摘      要：The problem of maximizing the throughput of Semiconductor Wafer Fabrication Systems is *** model the fabrication systems as a Stochastic Timed Automata and design a discrete-event simulation *** simulation scheme is explicit,fast and achieves high fidelity which captures the feature of reentrant process flow and is flexible to accommodate diversified wafer lot scheduling policies.A series of Marginal Machine Allocation Algorithms are proposed to sequentially allocate *** experiments suggest the designed methods are efficient to find good allocation solutions.