Flexible broadband WS_(2)/Si optical position-sensitive detector with high sensitivity and fast speed

作     者：Yunjie Liu Yupeng Wu Fuhai Guo Yingming Liu Shirong Zhao Siqi Li Weizhuo Yu Lanzhong Hao Yunjie Liu;Yupeng Wu;Fuhai Guo;Yingming Liu;Shirong Zhao;Siqi Li;Weizhuo Yu;Lanzhong Hao

作者机构：College of ScienceChina University of PetroleumQingdao 266580China School of Materials Science and EngineeringChina University of PetroleumQingdao 266580China 

出 版 物：《International Journal of Minerals,Metallurgy and Materials》 (矿物冶金与材料学报（英文版）)

年 卷 期：2023年第30卷第6期

页      面：1217-1224页

核心收录：

学科分类：08[工学] 0803[工学-光学工程] 

基　　金：supported by the National Natural Science Foundation of China(No.51972341) the Shandong Natural Science Foundation,China(No.ZR2020MA069) 

主　　题：flexible position-sensitive detectors WS^(2)heterostructure broad spectral response high sensitivity 

摘      要：Si-based optical position-sensitive detectors(PSDs)have stimulated the interest of researchers due to their wide range of practical ***,due to the rigidity and fragility of Si crystals,the applications of flexible PSDs have been ***,we presented a flexible broadband PSD based on a WS_(2)/Si heterostructure for the first time.A scalable sputtering method was used to deposit WS_(2)thin films onto the etched ultrathin crystalline Si *** fabricated flexible PSD device has a broad spectral response in the wavelength range of 450-1350 nm,with a high position sensitivity of~539.8 mV·mm^(−1)and a fast response of 2.3μs,thanks to the strong light absorption,the built-in electrical field at the WS_(2)/Si interface,and facilitated ***,mechanical-bending tests revealed that after 200 mechanical-bending cycles,the WS_(2)/Si PSDs have excellent mechanical flexibility,stability,and durability,demonstrating the great potential in wearable PSDs with competitive performance.