Design and experiments of a small resonant inchworm piezoelectric robot

作     者：DENG Jie YANG ChengLin LIU YingXiang ZHANG ShiJing LI Jing MA XueFeng XIE Hui 

作者机构：State Key Laboratory of Robotics and SystemHarbin Institute of TechnologyHarbin 150001China 

出 版 物：《Science China(Technological Sciences)》 (中国科学（技术科学英文版）)

年 卷 期：2023年第66卷第3期

页      面：821-829页

核心收录：

学科分类：080202[工学-机械电子工程] 08[工学] 0804[工学-仪器科学与技术] 0802[工学-机械工程] 0811[工学-控制科学与工程] 

基　　金：supported by the National Natural Science Foundation of China(Grant Nos.5210051275 and U1913215) the China Postdoctoral Science Foundation(Grant No.2021M690830) the Postdoctoral Science Foundation of Heilongjiang Province(Grant No.LBH-Z21018) 

主　　题：piezoelectric robot resonant actuation inchworm movement bending and longitudinal vibration 

摘      要：A small resonant inchworm piezoelectric robot with six driving feet which are set evenly along the circumference is proposed and tested.A bonded-type structure is adopted to realize a small *** radial bending vibration mode and longitudinal vibration mode are excited at the same *** superposition of these two vibration modes makes the driving feet produce elliptical *** the driving force can be generated by friction coupling between the driving foot and the operating *** structure of the robot is designed by finite element *** geometric parameters are adjusted to make the resonant frequencies of the vibration modes as close as *** elliptical trajectories generated at the driving feet are discussed in *** vibration and motion characteristics of the prototype are tested,and the resonant frequencies of the radial bending mode and the longitudinal vibration mode are degenerated *** optimal working frequency of the prototype is 21.5 *** maximum speed of the prototype is 200 mm/s,and the displacement resolution is 0.71μ*** measured results show that the resonant inchworm piezoelectric robot can be used for fast and high-precision transportation in narrow space.