Bioinspired flexible piezoresistive sensor for high-sensitivity detection of broad pressure range

作     者：Meng Wang Hao Zhang Han Wu Suqian Ma Lei Ren Yunhong Liang Chunbao Liu Zhiwu Han Meng Wang;Hao Zhang;Han Wu;Suqian Ma;Lei Ren;Yunhong Liang;Chunbao Liu;Zhiwu Han

作者机构：Center of Reproductive MedicineCenter of Prenatal DiagnosisThe First Hospital of Jilin UniversityChangchun 130021China The Key Laboratory of Bionic EngineeringMinistry of EducationJilin UniversityChangchun 130025China School of Mechanical and Aerospace EngineeringJilin UniversityChangchun 130025China 

出 版 物：《Bio-Design and Manufacturing》 (生物设计与制造（英文）)

年 卷 期：2023年第6卷第3期

页      面：243-254页

核心收录：

学科分类：0831[工学-生物医学工程（可授工学、理学、医学学位）] 1002[医学-临床医学] 080202[工学-机械电子工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 

基　　金：the Project of National Key Research and Development Program of China(No.2018YFC2001300) the National Natural Science Foundation of China(Nos.52175271,51822504,52021003,52105299,51905207,and 91948302) Science and Technology Development Plan Project of Jilin Province(No.20210508057RQ) Program for JinlinUniversity Science and Technology Innovative Research Team(No.2017TD-04) Scientific Research Project of EducationDepartment of Jilin Province(No.JJKH20211084KJ) 

主　　题：Bionic Piezoresistive pressure sensor Microstructure Multilayer Wide pressure range 

摘      要：The human skin has the ability to sense tactile touch and a great range of ***,in prosthetic or robotic systems,it is necessary to prepare pressure sensors with high sensitivity in a wide measurement range to provide human-like tactile ***,we developed a flexible piezoresistive pressure sensor that is highly sensitive in a broad pressure range by using lotus leaf micropatterned polydimethylsiloxane and multilayer *** superposing four layers of micropatterned constructive substrates,the multilayer piezoresistive pressure sensor achieves a broad pressure range of 312 kPa,a high sensitivity of 2.525 kPa^(−1),a low limit of detection(LOD)of12 Pa,and a fast response time of 45 *** with the traditional flexible pressure sensor,the pressure range of this sensor can be increased by at least an order of *** flexible piezoresistive pressure sensor also shows high robustness:after testing for at least 1000 cycles,it shows no sign of *** importantly,these sensors can be potentially applied in various human motion detection scenarios,including tiny pulse monitoring,throat vibration detection,and large under-feet pressure *** proposed fabrication strategy may guide the design of other kinds of multifunctional sensors to improve the detection performance.