Record-Breaking Frequency of 44 GHz Based on the Higher Order Mode of Surface Acoustic Waves with LiNbO_(3)/SiO_(2)/SiC Heterostructures

作     者：Jian Zhou Dinghong Zhang Yanghui Liu Fengling Zhuo Lirong Qian Honglang Li Yong-Qing Fu Huigao Duan Jian Zhou;Dinghong Zhang;Yanghui Liu;Fengling Zhuo;Lirong Qian;Honglang Li;Yong-Qing Fu;Huigao Duan

作者机构：College of Mechanical and Vehicle EngineeringHunan UniversityChangsha 410082China Tianjin Key Laboratory of Film Electronic and Communication DevicesSchool of Integrated Circuit Science and EngineeringTianjin University of TechnologyTianjin 30084China CAS Center for Excellence in NanoscienceNational Center for Nanoscience and TechnologyBeijing 100190China Faculty of Engineering and EnvironmentNorthumbria UniversityNewcastle upon Tyne NE18STUK 

出 版 物：《Engineering》 (工程（英文）)

年 卷 期：2023年第20卷第1期

页      面：112-119页

核心收录：

学科分类：080903[工学-微电子学与固体电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 

基　　金：supported by the National Science Foundation of China(NSFC)(52075162) the Program of New and High-Tech Industry of Hunan Province(2020GK2015 and 2021GK4014) the Excellent Youth Fund of Hunan Province(2021JJ20018) the Key Program of Guangdong(2020B0101040002) the Joint Fund of the Ministry of Education(Young Talents) the Natural Science Foundation of Changsha(kq2007026) the Tianjin Enterprise Science and Technology Commissioner Project(19JCTPJC56200) the Engineering Physics and Science Research Council of the United Kingdom(EPSRC EP/P018998/1) 

主　　题：Ultra-high frequency SAW Higher order mode Hyper sensitive detection 

摘      要：Surface acoustic wave (SAW) technology has been extensively explored for wireless communication, sensors, microfluidics, photonics, and quantum information processing. However, due to fabrication issues, the frequencies of SAW devices are typically limited to within a few gigahertz, which severely restricts their applications in 5G communication, precision sensing, photonics, and quantum control. To solve this critical problem, we propose a hybrid strategy that integrates a nanomanufacturing process (i.e., nanolithography) with a LiNbO_(3)/SiO_(2)/SiC heterostructure and successfully achieve a record-breaking frequency of about 44 GHz for SAW devices, in addition to large electromechanical coupling coefficients of up to 15.7%. We perform a theoretical analysis and identify the guided higher order wave modes generated on these slow-on-fast SAW platforms. To demonstrate the superior sensing performance of the proposed ultra-high-frequency SAW platforms, we perform micro-mass sensing and obtain an extremely high sensitivity of approximately 33151.9 MHz·mm2·μg−1, which is about 1011 times higher than that of a conventional quartz crystal microbalance (QCM) and about 4000 times higher than that of a conventional SAW device with a frequency of 978 MHz.