Thermoelastic damping in MEMS gyroscopes at high frequencies
作者机构：Robert Bosch GmbHCorporate Research71272RenningenGermany Department of Electrical&Computer EngineeringTechnical University of Munich85748GarchingGermany Munich Center for Quantum Science and Technology(MCQST)80799MunichGermany TUM Center for Quantum Engineering(ZQE)85748GarchingGermany
出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)
年 卷 期：2023年第9卷第1期
页 面：137-148页
核心收录：
学科分类：080805[工学-电工理论与新技术] 0808[工学-电气工程] 080202[工学-机械电子工程] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0802[工学-机械工程] 0811[工学-控制科学与工程]
基 金：Funding Open Access funding enabled and organized by Projekt DEAL
主 题：uniquely generic quantities
摘 要：Microelectromechanical systems(MEMS)gyroscopes are widely used,e.g.,in modern automotive and consumer applications,and require signal stability and accuracy in rather harsh environmental *** many use cases,device reliability must be guaranteed under large external loads at high *** sensitivity of the sensor to such external loads depends strongly on the damping,or rather quality factor,of the high-frequency mechanical modes of the *** this paper,we investigate the influence of thermoelastic damping on several high-frequency modes by comparing finite element simulations with measurements of the quality factor in an application-relevant temperature *** measure the quality factors over different temperatures in vacuum,to extract the relevant thermoelastic material parameters of the polycrystalline MEMS *** simulation results show a good agreement with the measured quantities,therefore proving the applicability of our method for predictive purposes in the MEMS design ***,we are able to uniquely identify the thermoelastic effects and show their significance for the damping of the high-frequency modes of an industrial MEMS *** approach is generic and therefore easily applicable to any mechanical structure with many possible applications in nano-and micromechanical systems.
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