Direct fabrication of flexible tensile sensors enabled by polariton energy transfer based on graphene nanosheet films

作     者：Xi Zhang Junchi Ma Wenhao Huang Jichen Zhang Chaoyang Lyu Yu Zhang Bo Wen Xin Wang Jing Ye Dongfeng Diao Xi Zhang;Junchi Ma;Wenhao Huang;Jichen Zhang;Chaoyang Lyu;Yu Zhang;Bo Wen;Xin Wang;Jing Ye;Dongfeng Diao

作者机构：College of Mechatronics and Control EngineeringShenzhen UniversityShenzhen 518060China Research Center of Medical Plasma TechnologyShenzhen UniversityShenzhen 518060China Shenzhen Milebot Robotics Co.Ltd.Shenzhen 518060China 

出 版 物：《Nanotechnology and Precision Engineering》 (纳米技术与精密工程（英文）)

年 卷 期：2023年第6卷第1期

页      面：1-11页

核心收录：

学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080202[工学-机械电子工程] 0804[工学-仪器科学与技术] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 0802[工学-机械工程] 0702[理学-物理学] 

基　　金：support of the National Natural Science Foundation of China(Grant Nos.52275565,NSFC-JSPS:52011540005,and 62104155) the Natural Science Foundation of Guangdong Province(Grant No.2022A1515011667) the Guangdong Kangyi Special Fund(Grant No.2020KZDZX1173) 

主　　题：Direct flexible fabrication Graphene nanosheets film Polariton energy transfer Flexible sensor Quantum manufacturing 

摘      要：A fundamental problem in the direct manufacturing of flexible devices is the low melting temperature of flexible substrates,which hinders the development of flexible *** here is an electron-cyclotron-resonance sputtering system that can batch-fabricate devices directly on flexible substrates under a low temperature by virtue of the polariton energy transfer between the plasma and the *** graphene nanosheet-embedded carbon(F-GNEC)films are manufactured directly on polyimide,polyethylene terephthalate,and polydimethylsiloxane,and how the substrate bias(electron energy),microwave power(plasma flux and energy),and magnetic field(electron flux)affect the nanostructure of the F-GNEC films is investigated,indicating that electron energy and flux contribute to the formation of standing graphene nanosheets in the *** films have good uniformity of distribution in a large size(17 mm×17 mm),and tensile and angle sensors with a high gauge factor(0.92)and fast response(50 ms)for a machine hand are obtained by virtue of the unique nanostructure of the F-GNEC *** work sheds light on the quantum manufacturing of carbon sensors and its applications for intelligent machine hands and virtual-reality technology.