Recent Progress on Flexible Room-Temperature Gas Sensors Based on Metal Oxide Semiconductor

作     者：Lang-Xi Ou Meng-Yang Liu Li-Yuan Zhu David Wei Zhang Hong-Liang Lu Lang-Xi Ou;Meng-Yang Liu;Li-Yuan Zhu;David Wei Zhang;Hong-Liang Lu

作者机构：State Key Laboratory of ASIC and SystemShanghai Institute of Intelligent Electronics&SystemsSchool of MicroelectronicsFudan UniversityShanghai 200433People’s Republic of China Yiwu Research Institute of Fudan UniversityChengbei RoadYiwu City 322000ZhejiangPeople’s Republic of China 

出 版 物：《Nano-Micro Letters》 (纳微快报（英文版）)

年 卷 期：2022年第14卷第12期

页      面：310-351页

核心收录：

学科分类：080202[工学-机械电子工程] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 

基　　金：This work is supported by This work was supported by the National Key R&D Program of China(Nos.2020YFB2008604 and 2021YFB3202500) the National Natural Science Foundation of China(Nos.61874034 and 51861135105) the International Science and Technology Cooperation Program of Shanghai Science and Technology Innovation Action Plan(No.21520713300) Fudan University-CIOMP Joint Fund(E02632Y7H0) 

主　　题：Metal oxide semiconductor Flexible gas sensor Room temperature Nanomaterials 

摘      要：With the rapid development of the Internet of Things,there is a great demand for portable gas *** oxide semiconductors(MOS)are one of the most traditional and well-studied gas sensing materials and have been widely used to prepare various commercial gas ***,it is limited by high operating *** current research works are directed towards fabricating high-performance flexible room-temperature(FRT)gas sensors,which are effective in simplifying the structure of MOS-based sensors,reducing power consumption,and expanding the application of portable *** article presents the recent research progress of MOS-based FRT gas sensors in terms of sensing mechanism,performance,flexibility characteristics,and *** review comprehensively summarizes and discusses five types of MOS-based FRT gas sensors,including pristine MOS,noble metal nanoparticles modified MOS,organic polymers modified MOS,carbon-based materials(carbon nanotubes and graphene derivatives)modified MOS,and two-dimensional transition metal dichalcogenides materials modified *** effect of light-illuminated to improve gas sensing performance is further ***,the applications and future perspectives of FRT gas sensors are also discussed.