Challenges and strategies in high-accuracy manufacturing of the world’s largest SiC aspheric mirror

作     者：Xuejun Zhang Haixiang Hu Xiaokun Wang Xiao Luo Ge Zhang Wenxing Zhao Xiaoyi Wang Zhenyu Liu Ling Xiong Erhui Qi Congcong Cui Yanchao Wang Yingjie Li Xu Wang Longxiang Li Yang Bai Qiang Cheng Zhiyu Zhang Ruigang Li Wa Tang Xuefeng Zeng Weijie Deng Feng Zhang Xuejun Zhang;Haixiang Hu;Xiaokun Wang;Xiao Luo;Ge Zhang;Wenxing Zhao;Xiaoyi Wang;Zhenyu Liu;Ling Xiong;Erhui Qi;Congcong Cui;Yanchao Wang;Yingjie Li;Xu Wang;Longxiang Li;Yang Bai;Qiang Cheng;Zhiyu Zhang;Ruigang Li;Wa Tang;Xuefeng Zeng;Weijie Deng;Feng Zhang

作者机构：Changchun Institute of OpticsFine Mechanics and PhysicsChinese Academy of Sciences130033 ChangchunJilinChina University of Chinese Academy of Sciences100049 BeijingChina 

出 版 物：《Light(Science & Applications)》 (光（科学与应用)（英文版）)

年 卷 期：2022年第11卷第12期

页      面：2873-2885页

核心收录：

学科分类：080503[工学-材料加工工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 080201[工学-机械制造及其自动化] 

基　　金：financial support by Key Research Program of Frontier Sciences,Chinese Academy of Sciences(QYZDJ-SSW-JSC038) Bureau of International Cooperation,Chinese Academy of Sciences(181722KYSB20180015) Jilin Province Science and Technology Development Plan Project Mission Statement(20200401065GX) National Natural Science Foundation of China(62127901,61805243,11803037,61975201,11903035,11903036,62005278,12003035,12003034,62075218,and 12103054) Youth Innovation Promotion Association,Chinese Academy of Sciences(2019221,2021215,and 2022213) 

主　　题：cladding casting carbide 

摘      要：In the process of manufacturing the world’s largest silicon carbide(SiC)aspheric mirror,the primary difficulties are mirror blank preparation,asphere fabrication,and testing,as well as cladding and ***,the challenges include the homogeneity of the complicated structure casting,accuracy and efficiency of the fabrication process,print-through effect,fidelity and precision of test procedure,stress and denseness of cladding process,the dynamic range of interferometric measurement,and air turbulence error due to the long optical *** break through such a barrier of difficulties,we proposed the water-soluble room temperature vanishing mold and gel casting technology,homogeneous microstructure reaction-formed joint technology,nano-accuracy efficient compound fabrication,gravity unloading technology,high-denseness low-defect physical vapor deposition(PVD)Si-cladding technology,test data fusion method,and time-domain averaging method,*** on the proposed technologies and methods,we have accomplished the world’s largest SiC aspheric mirror with a size of φ4.03 *** impressive performance of the SiC aspheric mirror is validated by the characteristics of the fabricated SiC aspheric *** aerial density of the SiC blank is less than 120 kg/m^(2),surface shape test accuracy is better than 6 nm RMS,thickness inhomogeneity of the cladding layer is less than 5%,and the final surface figure error and roughness are 15.2 nm RMS and 0.8 nm RMS,respectively.