A controllable fabrication improved silicon nanowire array sensor on(111)SOI for accurate bio-analysis application
作者机构：Science and Technology on Micro-system LaboratoryShanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050China University of Chinese Academy of Sciences(UCAS)Beijing 100190China
出 版 物：《Nano Research》 (纳米研究（英文版）)
年 卷 期：2022年第15卷第8期
页 面：7468-7475页
核心收录：
学科分类：0710[理学-生物学] 1002[医学-临床医学] 07[理学] 1001[医学-基础医学(可授医学、理学学位)] 08[工学] 080202[工学-机械电子工程] 070205[理学-凝聚态物理] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 0702[理学-物理学]
主 题：silicon nanowire top-down (111)silicon-on-insulator triangular cross-section quantitative detection
摘 要：Silicon nanowire field-effect transistor(SiNW-FET)sensors possess the ability of rapid response,real-time,and label-free detection with high sensitivity and selectivity in the analysis of charged molecules.Their nano-scale size makes them well suited for ultralow detection of charged molecules,but also brings the uniformity fabrication challenging,thus limiting their large-scale application.By a horizontal control approach,highly controllable silicon nanowires arrays at the top of the silicon-on-insulator(SOI)wafer(T-SiNW)were developed in our previous work.To further improve the device uniformity,here a novel SiNW fabricated approach was carefully designed by the combination of horizontal and vertical control.The new silicon nanowires appeared at the bottom of the top silicon layer(B-SiNW).The B-SiNW has a relatively low requirement on the fabrication process and better device uniformity compared to T-SiNW.These improvements resulted in the B-SiNW device with a lower current fluctuation(4.1 nA with 5.1%variations)in the flowing liquid,compared to the T-SiNW device(4.4 nA with 11%variations).Further,in quantitative detection of 40 ng/mL MMP-9,the B-SiNW sensors provided larger signals and lower fluctuation(normalized average response value:0.57 with 4.2%variations),compared to the T-SiNW sensors(0.41 with 12.1%variations),thus indicating a more accurate bio-analysis application of the B-SiNW sensor.This work advances the nanowire sensor technology a step closer toward large-scale application to create stable sensing platforms in disease diagnosis and monitoring.
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