Flexible multifunctional platform based on piezoelectric acoustics for human–machine interaction and environmental perception

作     者：Qian Zhang Yong Wang Dongsheng Li Jin Xie Ran Tao Jingting Luo Xuewu Dai Hamdi Torun Qiang Wu Wai Pang Ng Richard Binns YongQing Fu Qian Zhang;Yong Wang;Dongsheng Li;Jin Xie;Ran Tao;Jingting Luo;Xuewu Dai;Hamdi Torun;Qiang Wu;Wai Pang Ng;Richard Binns;YongQing Fu

作者机构：The State Key Laboratory of Fluid Power and Mechatronic SystemsZhejiang University310027 HangzhouChina Faculty of Engineering and EnvironmentUniversity of NorthumbriaNewcastle upon Tyne NE18STUK Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang ProvinceSchool of EngineeringWestlake University310024 HangzhouChina Key Laboratory of Optoelectronic Devices and Systems of Education Ministry and Guangdong ProvinceCollege of Physics and Optoelectronic EngineeringShenzhen University518060 ShenzhenChina 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2022年第8卷第5期

页      面：91-103页

核心收录：

学科分类：08[工学] 080203[工学-机械设计及理论] 0802[工学-机械工程] 

基　　金：supported by the“National Natural Science Foundation of China(NSFC 51875521,52175552,12104320)” the“Zhejiang Provincial Natural Science Foundation of China(LZ19E050002)” the Key Research and Development Program of Guangdong Province(Grant No.2020B0101040002) Special Projects in Key Fields of Colleges in Guangdong Province(2020ZDZX2007) Research Project in Fundamental and Application Fields of Guangdong Province(2020A1515110561) Guangdong Basic and Applied Basic Research Foundation(2019A1515111199) Shenzhen Science&Technology Project(Grant Nos.JCYJ20180507182106754,JCYJ20180507182439574,RCBS20200714114918249,GJHZ20200731095803010) the Engineering Physics and Science Research Council of UK(EPSRC 10 EP/P018998/1) International Exchange Grant(IEC/NSFC/201078)through Royal Society UK and the NSFC EPSRC NetworkPlus in Digitalized Surface Manufacturing(EP/S036180/1) 

主　　题：acoustics piezoelectric speakers 

摘      要：Flexible human–machine interfaces show broad prospects for next-generation flexible or wearable electronics compared with their currently available bulky and rigid ***,compared to their rigid counterparts,most reported flexible devices(e.g.,flexible loudspeakers and microphones)show inferior performance,mainly due to the nature of their ***,it is of great significance to improve their performance by developing and optimizing new materials,structures and design *** this paper,a flexible acoustic platform based on a zinc oxide(ZnO)thin film on an aluminum foil substrate is developed and optimized;this platform can be applied as a loudspeaker,a microphone,or an ambient sensor depending on the selection of its excitation *** used as a speaker,the proposed structure shows a high sound pressure level(SPL)of~90 dB(with a standard deviation of~3.6 dB),a low total harmonic distortion of~1.41%,and a uniform directivity(with a standard deviation of~4 dB).Its normalized SPL is higher than those of similar devices reported in the recent *** used as a microphone,the proposed device shows a precision of 98%for speech recognition,and the measured audio signals show a strong similarity to the original audio signals,demonstrating its equivalent performance compared to a rigid commercial *** a flexible sensor,this device shows a high temperature coefficient of frequency of−289 ppm/K and good performance for respiratory monitoring.