67 GHz light-trapping-structure germanium photodetector supporting 240 Gb/s PAM-4 transmission

作     者：DAIGAO CHEN HONGGUANG ZHANG MIN LIU XIAO HU YUGUANG ZHANG DINGYI WU PEIQI ZHOU SIYAO CHANG LEI WANG XI XIAO DAIGAO CHEN;HONGGUANG ZHANG;MIN LIU;XIAO HU;YUGUANG ZHANG;DINGYI WU;PEIQI ZHOU;SIYAO CHANG;LEI WANG;XI XIAO

作者机构：National Information Optoelectronics Innovation CenterChina Information and Communication Technologies Group Corporation(CICT)Wuhan 430074China State Key Laboratory of Optical Communication Technologies and NetworksChina Information and Communication Technologies Group Corporation(CICT)Wuhan 430074China Peng Cheng LaboratoryShenzhen 518055China 

出 版 物：《Photonics Research》 (光子学研究（英文版）)

年 卷 期：2022年第10卷第9期

页      面：2165-2171页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：National Key Research and Development Program of China(2019YFB2205200 2019YFB1803602) 

主　　题：Gb/s trapping structure 

摘      要：A light-trapping-structure vertical Ge photodetector(PD)is *** the scheme,a 3μm radius Ge mesa is fabricated to constrain the optical signal in the circular absorption *** from the light-trapping structure,the trade-off between bandwidth and responsivity can be relaxed,and high opto-electrical bandwidth and high responsivity are achieved *** measured 3 d B bandwidth of the proposed PD is around67 GHz,and the responsivity is around 1.05 A/W at wavelengths between 1520 and 1560 *** 1580 nm,the responsivity is still over 0.78 A/W.A low dark current of 6.4 n A is also achieved at-2 V bias *** on this PD,a clear eye diagram of 100 GBaud four-level pulse amplitude modulation(PAM-4)is *** the aid of digital signal processing,240 Gb/s PAM-4 signal back-to-back transmission is achieved with a bit error ratio of 1.6×10^(-2).After 1 km and 2 km fiber transmission,the highest bit rates are 230 and 220 Gb/s,respectively.