Integrated optical-readout of a high-Q mechanical out-of-plane mode
作者机构：Kavli Institute of NanoscienceDepartment of Quantum NanoscienceDelft University of Technology2628CJ DelftThe Netherlands
出 版 物：《Light(Science & Applications)》 (光（科学与应用)（英文版）)
年 卷 期：2022年第11卷第10期
页 面：2485-2491页
核心收录：
学科分类：0808[工学-电气工程] 070207[理学-光学] 0809[工学-电子科学与技术（可授工学、理学学位）] 07[理学] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0803[工学-光学工程] 0702[理学-物理学]
基 金：This work is supported by the European Research Council(ERC StG Strong-Q,676842 and ERC CoG Q-ECHOS,101001005) by the Netherlands Organization for Scientific Research(NWO/OCW) as part of the Frontiers of Nanoscience program,as well as through Vidi(680-47-541/994) Vrij Programma(680-92-18-04)grants.J.G.gratefully acknowledges support through a Casimir Ph.D.fellowship
摘 要：The rapid development of high-QM macroscopic mechanical resonators has enabled great advances in *** improvements could allow for quantum-limited or quantum-enhanced applications at ambient *** of the remaining challenges include the integration of high-QM structures on a chip,while simultaneously achieving large coupling strengths through an optical ***,we present a versatile fabrication method,which allows us to build fully integrated optomechanical *** place a photonic crystal cavity directly above a mechanical resonator with high-QM fundamental out-of-plane mode,separated by a small *** highly confined optical field has a large overlap with the mechanical mode,enabling strong optomechanical interaction ***,we implement a novel photonic crystal design,which allows for a very large cavity photon number,a highly important feature for optomechanical experiments and sensor *** versatile approach is not limited to our particular design but allows for integrating an out-of-plane optical read-out into almost any device ***,it can be scaled to large arrays and paves the way to realizing quantum experiments and applications with mechanical resonators based on high-QM out-of-plane modes alike.
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