Tailoring the microstructure,mechanical and tribocorrosion performance of (CrNbTiAlV)N_(x) high-entropy nitride films by controlling nitrogen flow

作     者：Cunxiu Zhang Xiaolong Lu Cong Wang Xudong Sui Yanfang Wang Haibin Zhou Junying Hao Cunxiu Zhang;Xiaolong Lu;Cong Wang;Xudong Sui;Yanfang Wang;Haibin Zhou;Junying Hao

作者机构：State Key Laboratory of Solid LubricationLanzhou Institute of Chemical PhysicsChinese Academy of SciencesLanzhou 730000China School of Materials Science and EngineeringChina University of Petroleum(East China)Qingdao 266580China Center of Materials Science and Optoelectronics EngineeringUniversity of Chinese Academy of SciencesBeijing 100049China Qingdao Center of Resource Chemistry and New MaterialsQingdao 266000China 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：2022年第107卷第12期

页      面：172-182页

核心收录：

学科分类：080503[工学-材料加工工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 

基　　金：the financial support of the National Natural Science Foundation of China(Nos.51835012 and 51975554) the National Key R&D Plan of China(No.2018YFB0703803) the program of“Science&Technology International Cooperation Demonstrative Base of Metal Surface Engineering along the Silk Road(No.2017D01003)” CAS“Light of West China”。 

主　　题：High-entropy nitride films Nitrogen flow Tribocorrosion performance Magnetron sputtering 

摘      要：The(CrNbTiAlV)N_(x)high-entropy nitride films were fabricated by adjusting nitrogen flow via magnetron sputtering.The microstructure,mechanical,electrochemical and tribocorrosion performances of the films were studied.The results show that the films transform from amorphous to nanocrystalline structure as nitrogen flow increased.The nanocrystalline films show super hardness(40 GPa)and adhesion strength(50 N).The amorphous film has a pretty anti-corrosion in static corrosion,while not in tribocorrosion condition.The film deposited at nitrogen flow of 38 sccm exhibits the optimal tribocorrosion performance in artificial seawater,with the highest open circuit potential(∼−0.1 V vs.Ag/AgCl),the lowest friction coefficient(∼0.162)and wear rate(∼7.48×10^(−7)mm^(3)N^(−1)m^(−1)).