Direct synthesis of moirésuperlattice through chemical vapor deposition growth of monolayer WS_(2)on plasma-treated HOPG
作者机构：Department of PhysicsEngineering Research Center for Micro-Nano Optoelectronic Materials and Devices at Education MinistryOSEDFujian Provincial Key Laboratory of Semiconductor Materials and ApplicationsXiamen UniversityXiamen 361005China
出 版 物：《Nano Research》 (纳米研究（英文版）)
年 卷 期：2022年第15卷第9期
页 面：8587-8594页
核心收录：
学科分类：07[理学] 070204[理学-等离子体物理] 0703[理学-化学] 0702[理学-物理学]
基 金：the National Natural Science Foundations of China(Nos.61974123,61874092,and 61804129) the National Science Fund for Excellent Young Scholars(No.62022068) the Fundamental Research Funds for the Central Universities(Nos.20720190055 and 20720190058)
主 题：chemical vapor deposition plasma pretreatment van der Waals(vdW)heterostructures moirésuperlattice
摘 要：Vertical van der Waals(vdW)heterostructures composed of two-dimensional(2D)layered materials have recently attracted substantial interests due to their unique ***,the direct synthesis of moirésuperlattice remains a great challenge due to the difficulties in heterogeneous nucleation on smooth vdW ***,we report a controllable chemical vapor deposition growth of complete monolayer WS_(2)on highly ordered pyrolytic graphite(HOPG)substrates through the plasma *** results show that the morphologies of the grown WS_(2)have a strong dependence on the plasma parameters,including gas composition,source power,and treatment *** is found that the surface C–C bonds are broken in the plasma pretreated HOPG,and the formed small clusters can act as the nucleation sites for the subsequent growth of WS_(2).Moreover,the height of clusters dominates the growth mode of WS_(2)islands.A transition from a 2D mode to three-dimensional(3D)growth mode occurs when the height is higher than the interlayer spacing of the ***,diverse moirésuperlattices with different twist angles for WS_(2)/HOPG heterostructures are observed,and the formation mechanism is further analyzed by firstprinciples calculations.
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