Molybdenum sputtering film characterization for high gradient accelerating structures

作     者：S.Bini B.Spataro A.Marcelli S.Sarti V.A.Dolgashev S.Tantawi A.D.Yeremian Y.Higashi M.G.Grimaldi L.Romano F.Rufno R.Parodi G.Cibin C.Marrelli M.Migliorati C.Caliendo 

作者机构：INFN - LNFVia E. Fermi 40Frascati (RM) 00044 Italy NSRL University of Science and Technology of China Chinese Academy of Sciences University of Rome-SapienzaDipartimento di FisicaPiazzale Aldo Moro 5Rome 00185Italy SLAC National Accelerator Laboratory2575 Sand Hill RoadMenlo ParkCA 94025USA KEK 1-1 OhoTsukubaIbaraki 305Japan University of CataniaDipartimento di Fisica e Astronomia & MATIS-IMM-CNRVia S. Sofia 64Catania 95123Italy INFN-GenovaVia Dodecaneso 33Genova 16146Italy Diamond Light SourceChiltonDidcotOxford OX110DEUK University of Roma-SapienzaDipartimento di Scienze di Base e Applicate per l’IngegneriaVia A. ScarpaRoma 14-00161-Italy Istituto dei Sistemi ComplessiISC-CNRArea della Ricerca di Roma 1Via Salaria km 29.300MonterotondoRome 00040Italy 

出 版 物：《Chinese Physics C》 (中国物理C（英文版）)

年 卷 期：2013年第37卷第9期

页      面：73-79页

核心收录：

学科分类：07[理学] 070202[理学-粒子物理与原子核物理] 0702[理学-物理学] 

基　　金：We also thank Diamond Light Source for the access to the beamline B18 (proposal nt1984-1) 

主　　题：linear accelerator cavities X-band coatings XANES resistivity 

摘      要：Technological advancements are strongly required to fulfill the demands of new accelerator devices with the highest accelerating gradients and operation reliability for the future colliders. To this purpose an extensive R^zD regarding molybdenum coatings on copper is in progress. In this contribution we describe chemical composition, deposition quality and resistivity properties of different molybdenum coatings obtained via sputtering. The deposited films are thick metallic disorder layers with different resistivity values above and below the molibdenum dioxide reference value. Chemical and electrical properties of these sputtered coatings have been characterized by Rutherford backscattering, XANES and photoemission spectroscopy. We will also consider multiple cells standing wave section coated by a molybdenum layer designed to improve the performance of X-Band accelerating systems.