Thermally-curable nanocomposite printing for the scalable manufacturing of dielectric metasurfaces
作者机构：Department of Materials Science and EngineeringKorea UniversitySeoul 02841Republic of Korea Department of Mechanical EngineeringPohang University of Science and Technology(POSTECH)Pohang 37673Republic of Korea Department of Manufacturing Systems and Design EngineeringSeoul National University of Science and TechnologySeoul 01811Republic of Korea Department of Chemical EngineeringPohang University of Science and Technology(POSTECH)Pohang 37673Republic of Korea POSCO-POSTECHRIST Convergence Research Center for Flat Optics and MetaphotonicsPohang 37673Republic of Korea National Institute of Nanomaterials Technology(NINT)Pohang 37673Republic of Korea
出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)
年 卷 期：2022年第8卷第4期
页 面：73-80页
核心收录：
学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学]
基 金：the financial supports from the Technology Innovation program(20000887,Development of self-healing impact resistant film coating material and process technology for rollable displays)funded by the Ministry of Trade,Industry&Energy(MOTIE) the International Research&Development program(NRF-2019K1A47A02113032)of the National Research Foundation(NRF)funded by the Ministry of Science and ICT(MSIT)of the Korean government.J.R.acknowledges the POSCO-POSTECH-RIST Convergence Research Center program funded by POSCO the LGD-SNU incubation program funded by LG Display the NRF grants(NRF-2022M3C1A3081312,CAMM-2019M3A6B3030637,NRF-2019R1A5A8080290)funded by the MSIT of the Korean government.J.K.acknowledges the POSTECH Alchemist fellowship.Y.K.acknowledges the Hyundai Motor Chung Mong-Koo fellowship,and the NRF Ph.D.fellowship(NRF-2022R1A6A3A13066251)funded by the Ministry of Education of the Korean government
主 题：surfaces durability resin
摘 要：Metasurfaces consisting of artificially designed meta-atoms have been popularized recently due to their advantages of amplitude and phase of light ***,the electron beam lithography method for metasurface fabrication has high cost and low throughput,which results in a limitation for the fabrication of *** this study,nanocomposite printing technology is used to fabricate high-efficiency metasurfaces with low *** demonstrate the efficiency of the proposed fabrication method,a metahologram is designed and fabricated using a *** metahologram exhibits conversion efficiencies of 48%and 35%at wavelengths of 532 and 635 nm,*** nanocomposite is composed of polymers with nanoparticles,so durability tests are also performed to evaluate the effects of temperature and humidity on the *** test verifies that at temperatures below the glass transition temperature of the base resin,the nanostructures do not collapse,so the efficiency of the metasurfaces remains almost the *** surrounding humidity does not affect the nanostructures at ***,the durability of the nanocomposite metasurfaces can be further enhanced by replacing the base resin,and this nanocomposite printing method will facilitate practical metasurface use at low cost.
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