High-performance modified uni-traveling carrier photodiode integrated on a thin-film lithium niobate platform
High-performance modified uni-traveling carrier photodiode integrated on a thin-film lithium niobate platform作者机构:Department of Electrical and Computer EngineeringUniversity of VirginiaCharlottesvilleVirginia 22903USA John A.Paulson School of Engineering and Applied SciencesHarvard UniversityCambridgeMassachusetts 02138USA HyperLight CorporationCambridgeMassachusetts 02139USA
出 版 物:《Photonics Research》 (光子学研究(英文版))
年 卷 期:2022年第10卷第6期
页 面:1338-1343页
核心收录:
基 金:National Science Foundation(2023775) Air Force Office of Scientific Research(FA 9550-17-1-0071) Defense Advanced Research Projects Agency(HR0011-20-C-0137)
主 题:traveling performance modified
摘 要:Lithium niobate on insulator(LNOI)has become an intriguing platform for integrated photonics for applications in communications,microwave photonics,and ***,integrated devices including modulators,resonators,and lasers with high performance have been recently realized on the LNOI platform,high-speed photodetectors,an essential building block in photonic integrated circuits,have not been demonstrated on LNOI ***,we demonstrate for the first time,heterogeneously integrated modified uni-traveling carrier photodiodes on LNOI with a record-high bandwidth of 80 GHz and a responsivity of 0.6 A/W at a 1550-nm *** photodiodes are based on an n-down In GaAs/InP epitaxial layer structure that was optimized for high carrier transit time-limited *** integration was achieved using a scalable wafer die bonding approach that is fully compatible with the LNOI platform.