Microstructure and mechanical properties of VAlN/Si_(3)N_(4) nano-multilayer coatings

作     者：TAO Xian-cheng LOU Yu-min LI Miao-lei ZHAO Ning-ning TANG Xiu-zhi HU Hai-long HUANG Xiao-zhong YUE Jian-ling 陶贤成;楼玉民;李淼磊;赵宁宁;唐秀之;胡海龙;黄小忠;岳建岭

作者机构：State Key Laboratory of Powder MetallurgyCentral South UniversityChangsha 410083China Hunan Key Laboratory of Advanced Fibers and CompositesCentral South UniversityChangsha 410083China Zhejiang Energy Group R&D Institute Co.Ltd.Hangzhou 310000China Institute of Aeronautics and AstronauticsCentral South UniversityChangsha 410012China 

出 版 物：《Journal of Central South University》 (中南大学学报（英文版）)

年 卷 期：2022年第29卷第5期

页      面：1403-1411页

核心收录：

学科分类：081702[工学-化学工艺] 08[工学] 0817[工学-化学工程与技术] 

基　　金：Project(51201187)supported by the National Natural Science Foundation of China 

主　　题：VAlN/Si_(3)N_(4) nano-multilayer coatings mechanical properties microstructure superhardness effect 

摘      要：VAlN coating is of particular interest for dry cutting applications owing to its low-friction and excellent ***-multilayer structure is designed to tailor the properties of VAlN *** this work,a series of VAlN/Si_(3)N_(4) nano-multilayer coatings with varied Si_(3)N_(4) layer thicknesses were prepared by reactive sputtering *** microstructure and mechanical properties of the coatings were both *** is revealed that Si_(3)N_(4) with a shallow thickness(~0.4 nm)was crystallized and grown coherently with VAlN,showing a remarkable increase in hardness compared to VAlN monolayer *** hardness of coherently VAlN/Si_(3)N_(4) nano-multilayer coatings reached to 48.7 *** further increase of Si_(3)N_(4) layer thickness,the coherent growth of nano-multilayers was terminated,showing amorphous structure formed in nano-multilayers and the hardness was *** the other hand,when Si_(3)N_(4) layer thickness was 0.4 nm,the friction coefficient of VAlN/Si_(3)N_(4) nano-multilayer coating was almost equal to that of VAlN monolayer coating,which was attributed to the crystallization of Si_(3)N_(4) and the produced coherent interfaces between VAlN and Si_(3)N_(4) for the hardening effect of nano-multilayer *** further increase of Si_(3)N_(4) layer thickness,pronounced improvement of friction coefficient in VAlN/Si_(3)N_(4) nano-multilayer coating was observed.