Effects of O_(2) addition on the plasma uniformity and reactivity of Ar DBD excited by ns pulsed and AC power supplies

作     者：Feng LIU Yue ZHUANG Yulei ZHAO Jie CHEN Zhi FANG 刘峰;庄越;赵昱雷;陈洁;方志

作者机构：College of Electrical Engineering and Control ScienceNanjing Tech UniversityNanjing 211816People’s Republic of China 

出 版 物：《Plasma Science and Technology》 (等离子体科学和技术（英文版）)

年 卷 期：2022年第24卷第5期

页      面：29-38页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 07[理学] 08[工学] 070204[理学-等离子体物理] 0702[理学-物理学] 

基　　金：supported by National Natural Science Foundation of China(Nos.52037004 and 51777091) 

主　　题：nanosecond pulse power supply dielectric barrier discharge discharge uniformity oxygen addition 

摘      要：Dielectric barrier discharges(DBDs)have been widely used in ozone synthesis,materials surface treatment,and plasma medicine for their advantages of uniform discharge and high plasmachemical *** improve the reactivity of DBDs,in this work,the O_(2) is added into Ar nanosecond(ns)pulsed and AC *** uniformity and discharge characteristics of Ar ns pulsed and AC DBDs with different O_(2) contents are investigated with optical and electrical diagnosis *** DBD uniformity is quantitatively analyzed by gray value standard deviation *** electrical parameters are extracted from voltage and current waveforms separation to characterize the discharge processes and calculate electron density n_(e).The optical emission spectroscopy is measured to show the plasma reactivity and calculate the trend of electron temperature T_(e) with the ratio of two emission *** is found that the ns pulsed DBD has a much better uniformity than AC DBD for the fast rising and falling *** the addition of O_(2),the uniformity of ns pulsed DBD gets worse for the space electric field distortion by O_(2)^(-),which promotes the filamentary ***,in AC DBD,the added O_(2) can reduce the intensity of filaments,which enhances the discharge *** ns pulsed DBD has a much higher instantaneous power and energy efficiency than AC *** ratio of Ar emission intensities indicates that the T_(e) drops quickly with the addition of O_(2) both ns pulsed and AC DBDs and the ns pulsed DBD has an obvious higher T_(e) and n_(e) than AC *** results are helpful for the realization of the reactive and uniform low temperature plasma sources.