Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line

作     者：Galina Georgieva Christian Mai Pascal M.Seiler Anna Peczek Lars Zimmermann Galina Georgieva;Christian Mai;Pascal M.Seiler;Anna Peczek;Lars Zimmermann

作者机构：Hochfrequenztechnik-Photonik/SiliziumphotonikTechnische Universität BerlinStraße des 17.Juni 13510623 BerlinGermany IHP-Leibnitz Institut für innovative MikroelektronikIm Technologiepark 2515236 Frankfurt(Oder)Germany IHP Solutions GmbHIm Technologiepark 715236 Frankfurt(Oder)Germany 

出 版 物：《Frontiers of Optoelectronics》 (光电子前沿（英文版）)

年 卷 期：2022年第15卷第1期

页      面：143-155页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

基　　金：This work was supported in part by the German Research Foundation(DFG)through the projects EPIC-Sense(ZI 1283-6-1) EPIDAC(ZI 1283-7-1) the Federal Ministry of Education and Research(BMBF)through project PEARLS(13N14932) 

主　　题：Hybrid integration Photonic BiCMOS Amorphous silicon Two-dimensional grating coupler(2D GC) Dual-polarization coherent communication Silicon photonics 

摘      要：In this paper,we report on polarization combining two-dimensional grating couplers(2D GCs)on amorphous Si:H,fabricated in the backend of line of a photonic BiCMOS *** 2D GCs can be used as an interface of a hybrid silicon photonic coherent transmitter,which can be implemented on bulk Si *** fabricated 2D GCs operate in the telecom C-band and show an experimental coupling efficiency of−5 dB with a wafer variation of±1.2 *** for efficiency enhancement and improved performance stability in future design generations are outlined and extension toward O-band devices is also investigated.