Novel method for detection of anomalous structure characteristics of ID precision ultrathin monocrystalline silicon section cutting tool

作     者：陈宗农 郭明 王庆九 余学功 

作者机构：DepartmentofMechanicalEngineeringZhejiangUniversityHangzhou310027China NationalHigh-PurltySilicon&SilicaneKeyLabZhejiangUniversityHangzhou310027China 

出 版 物：《Journal of Zhejiang University Science》 (浙江大学学报（自然科学英文版）)

年 卷 期：2002年第3卷第3期

页      面：263-267页

核心收录：

学科分类：08[工学] 0802[工学-机械工程] 080201[工学-机械制造及其自动化] 

主　　题：Machine tool spindle Bearing Monocrystalline silicon section Signal analysis 

摘      要：The structure characteristics of ID precision ultrathin monocrystalline silicon section cutting machine tool spindle with force monitoring bearings functioning as force measuring sensors were detected with the new Hilbert theory based signal wave envelope detection method, presented to replace the conventional hardware device in order to ensure that the signal is measured online with high fidelity. According to the probability of anomalous incidents in the cutting process, a mathematical recognition model has been designed and verified on an STC 22ID machine.